Xu Xiaofen, He Gang, Jiang Shanshan, Wang Leini, Wang Wenhao, Liu Yanmei, Gao Qian
School of Materials Science and Engineering, Anhui University Hefei 230601 China.
School of Integration Circuits, Anhui University Hefei 230601 China
RSC Adv. 2022 May 18;12(24):14986-14997. doi: 10.1039/d2ra01051h. eCollection 2022 May 17.
Due to the quantum confinement and edge effects, there has been ongoing enthusiasm to provide deep insight into graphene quantum dots (GQDs), serving as attractive semiconductor materials. To demonstrate the potential applications of GQDs in electronic devices, this work presents solution-processed high performance GQD-decorated InO thin-film transistors (TFTs) based on ZrO as gate dielectrics. GQDs-InO/ZrO TFTs with optimized doping content have demonstrated high electrical performance and low operating voltage, including a larger field-effect mobility ( ) of 34.02 cm V s, a higher / of 4.55 × 10, a smaller subthreshold swing (SS) of 0.08 V dec, a lower interfacial trap states ( ) of 5.84 × 10 cm and threshold voltage shift of 0.07 V and 0.12 V under positive bias stress (PBS) and negative bias stress (NBS) for 3600 s, respectively. As a demonstration of complex logic applications, a resistor-loaded unipolar inverter based on GQDs-InO/ZrO has been built, demonstrating full swing characteristic and high gain of 10.63. Low-frequency noise (LFN) characteristics of GQDs-InO/ZrO TFTs have been presented and it was concluded that the noise source can be attributed to the fluctuations in mobility. As a result, it can be concluded that solution-derived GDQ-optimized oxide-based TFTs will manifest potential applications in electronic devices.
由于量子限制和边缘效应,人们一直热衷于深入研究作为有吸引力的半导体材料的石墨烯量子点(GQDs)。为了展示GQDs在电子器件中的潜在应用,本文展示了基于ZrO作为栅极电介质的溶液处理的高性能GQD修饰的InO薄膜晶体管(TFTs)。具有优化掺杂含量的GQDs-InO/ZrO TFTs表现出高电性能和低工作电压,包括更大的场效应迁移率()为34.02 cm² V⁻¹ s⁻¹,更高的Ion/Ioff为4.55×10⁷,更小的亚阈值摆幅(SS)为0.08 V dec⁻¹,更低的界面陷阱态()为5.84×10¹¹ cm⁻²,以及在正偏压应力(PBS)和负偏压应力(NBS)下分别为3600 s时阈值电压偏移为0.07 V和0.12 V。作为复杂逻辑应用的演示,构建了基于GQDs-InO/ZrO的电阻加载单极逆变器,展示了全摆幅特性和10.63的高增益。本文还介绍了GQDs-InO/ZrO TFTs的低频噪声(LFN)特性,并得出噪声源可归因于迁移率波动的结论。因此,可以得出结论,溶液衍生的GDQ优化的氧化物基TFTs将在电子器件中展现潜在应用。