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阵列中微悬臂梁的频率方程和半经验机械耦合强度

Frequency equation and semi-empirical mechanical coupling strength of microcantilevers in an array.

作者信息

Dat Le Tri, Pham Vinh N T, Vy Nguyen Duy, Payam Amir F

机构信息

Computational Laboratory for Advanced Materials and Structures, Advanced Institute of Materials Science, Ton Duc Thang University, Ho Chi Minh City, Vietnam.

Faculty of Applied Sciences, Ton Duc Thang University, Ho Chi Minh City, Vietnam.

出版信息

Microsc Res Tech. 2022 Sep;85(9):3237-3244. doi: 10.1002/jemt.24180. Epub 2022 Jun 16.

DOI:10.1002/jemt.24180
PMID:35708241
Abstract

A characteristic equation for the frequencies of the T-shaped and overhang-shaped cantilevers is derived for the first time. We show that there are optimum values of the overhang lengths and widths that maximize the frequency and the number of maxima is corresponding to the mode number. The frequency of higher-order modes could be tuned by changing the overhang dimensions. Especially, a semi-empirical formula for the coupling strength between cantilevers in an array is proposed where the strength presents a cubic decrease with the overhang width and a linear increase with the overhang length , . There is a very good agreement between the proposed formula and the values obtained in recent experiments by other researchers.

摘要

首次推导了T形和悬臂形悬臂梁频率的特征方程。我们表明,存在使频率最大化的悬臂长度和宽度的最佳值,并且最大值的数量与振型数相对应。通过改变悬臂尺寸可以调整高阶振型的频率。特别是,提出了一个用于阵列中悬臂梁之间耦合强度的半经验公式,其中耦合强度随悬臂宽度呈三次方下降,随悬臂长度呈线性增加, 。所提出的公式与其他研究人员最近在实验中获得的值之间有非常好的一致性。

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