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通过利用基底形貌对局部膜厚进行差异化实现嵌段共聚物膜中纳米图案区域的可控间距。

Controlled Spacing between Nanopatterned Regions in Block Copolymer Films Obtained by Utilizing Substrate Topography for Local Film Thickness Differentiation.

机构信息

The Institute of Chemistry and the Center for Nanoscience and Nanotechnology , The Hebrew University of Jerusalem , Jerusalem 9190401 , Israel.

Institute for Theoretical Physics , Georg-August-University Göttingen , Friedrich-Hund-Platz 1 , 37077 Göttingen , Germany.

出版信息

ACS Appl Mater Interfaces. 2019 Sep 25;11(38):35247-35254. doi: 10.1021/acsami.9b12817. Epub 2019 Sep 17.

Abstract

Various types of devices require hierarchically nanopatterned substrates, where the spacing between patterned domains is controlled. Ultraconfined films exhibit extreme morphological sensitivity to slight variations in film thickness when the substrate is highly selective toward one of the blocks. Here, it is shown that using the substrate's topography as a thickness differentiating tool enables the creation of domains with different surface patterns in a fully controlled fashion from a single, unblended block copolymer. This approach is applicable to block copolymers of different compositions and to different topographical patterns and thus opens numerous possibilities for the hierarchical construction of multifunctional devices.

摘要

各种类型的器件都需要具有分级纳米图案的衬底,其中图案化域之间的间距受到控制。当衬底对其中一个嵌段具有高选择性时,超受限膜对膜厚的微小变化表现出极端的形态敏感性。在这里,研究表明,使用衬底的形貌作为厚度区分工具,可以从单一的、未混合的嵌段共聚物中以完全可控的方式创建具有不同表面图案的畴。这种方法适用于不同组成的嵌段共聚物以及不同的形貌图案,因此为多功能器件的分级构建开辟了许多可能性。

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