Ohnishi Tsuyoshi, Takada Kazunori
Center for Green Research on Energy and Environmental Materials, National Institute for Materials Science (NIMS), 1-1 Namiki, Tsukuba, Ibaraki 305-0044, Japan.
ACS Omega. 2022 Jun 8;7(24):21199-21206. doi: 10.1021/acsomega.2c02104. eCollection 2022 Jun 21.
This paper reports the thin-film synthesis of LiPO solid electrolytes by RF magnetron sputtering. A relatively high ionic conductivity of more than 1 × 10 S cm is achieved. It is revealed that the crystallization of LiPO impedes ionic conduction, and a moderate amount of O addition to Ar suppresses the crystallization and guarantees long-term deposition. Another important finding in this study is that when LiPO is deposited on a LiCoO film to construct a thin-film battery, the LiCoO film can be damaged depending on the substrate bias potential relative to the cathode potential propagated through the sputtering plasma. Active control of the bias potential to avoid the damage realizes negligible interface resistance in the thin-film battery.
本文报道了通过射频磁控溅射法进行LiPO固体电解质的薄膜合成。实现了相对较高的离子电导率，超过1×10 S/cm。研究表明，LiPO的结晶会阻碍离子传导，向氩气中适度添加氧气可抑制结晶并保证长期沉积。本研究的另一个重要发现是，当LiPO沉积在LiCoO薄膜上以构建薄膜电池时，LiCoO薄膜可能会因相对于通过溅射等离子体传播的阴极电位的衬底偏置电位而受损。通过主动控制偏置电位以避免这种损害，可使薄膜电池中的界面电阻忽略不计。
