Chen Hengbiao, Meng Lili, Lu Mengjiao, Song Ziwen, Wang Wen, Shao Xiuting
School of Information Science and Engineering, Shandong Normal University, Jinan 250014, China.
State Key Laboratory of Acoustics, Institute of Acoustics, Chinese Academy of Sciences, Beijing 100190, China.
Micromachines (Basel). 2023 Sep 26;14(10):1834. doi: 10.3390/mi14101834.
The SAW (surface acoustic wave) gyroscopic effect is a key parameter that reflects the sensitivity performance of SAW angular velocity sensors. This study found that adding a layer of non-piezoelectric material with a lower reflection coefficient than that of the upper-layer material below the piezoelectric substrate to form a double-layer structure significantly enhanced the SAW gyroscopic effect, and the smaller the reflection coefficient of the lower-layer material, the stronger the SAW gyroscopic effect, with values being reached that were two to three times those with single-layer substrate structures. This was confirmed using a three-dimensional model, and the experimental results also showed that the thickness of the piezoelectric layer and the type of the lower-layer material also had a significant impact on the SAW gyroscopic effect. This novel discovery will pave the way for the future development of SAW angular velocity sensors.
声表面波（SAW）陀螺效应是反映SAW角速度传感器灵敏度性能的关键参数。本研究发现，在压电基片下方添加一层反射系数低于上层材料的非压电材料以形成双层结构，可显著增强SAW陀螺效应，且下层材料的反射系数越小，SAW陀螺效应越强，其值达到单层基片结构的两到三倍。这通过三维模型得到了证实，实验结果还表明，压电层的厚度和下层材料的类型对SAW陀螺效应也有显著影响。这一新颖发现将为SAW角速度传感器的未来发展铺平道路。
