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柔性表面声波传感技术的最新进展

Recent Progress in Flexible Surface Acoustic Wave Sensing Technologies.

作者信息

Liang Chenlong, Yan Cancan, Zhai Shoupei, Wang Yuhang, Hu Anyu, Wang Wen, Pan Yong

机构信息

Institute of Acoustics, Chinese Academy of Sciences, Beijing 100190, China.

The School of Electronic, Electrical and Communication Engineering, University of Chinese Academy of Sciences, Beijing 100049, China.

出版信息

Micromachines (Basel). 2024 Feb 29;15(3):357. doi: 10.3390/mi15030357.

DOI:10.3390/mi15030357
PMID:38542604
原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC10971855/
Abstract

In this work, the major methods for implementing flexible sensing technology-flexible surface acoustic wave (SAW) sensors-are summarized; the working principles and device characteristics of the flexible SAW sensors are introduced; and the latest achievements of the flexible SAW sensors in the selection of the substrate materials, the development of the piezoelectric thin films, and the structural design of the interdigital transducers are discussed. This paper focuses on analyzing the research status of physical flexible SAW sensors such as temperature, humidity, and ultraviolet radiation, including the sensing mechanism, bending strain performance, device performance parameters, advantages and disadvantages, etc. It also looks forward to the development of future chemical flexible SAW sensors for gases, the optimization of the direction of the overall device design, and systematic research on acoustic sensing theory under strain. This will enable the manufacturing of multifunctional and diverse sensors that better meet human needs.

摘要

在这项工作中，总结了实现柔性传感技术的主要方法——柔性表面声波（SAW）传感器；介绍了柔性SAW传感器的工作原理和器件特性；讨论了柔性SAW传感器在衬底材料选择、压电薄膜开发以及叉指换能器结构设计方面的最新成果。本文重点分析了温度、湿度和紫外线辐射等物理柔性SAW传感器的研究现状，包括传感机制、弯曲应变性能、器件性能参数、优缺点等。还展望了未来用于气体的化学柔性SAW传感器的发展、整体器件设计方向的优化以及应变下声学传感理论的系统研究。这将有助于制造出更能满足人类需求的多功能、多样化传感器。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/9699/10971855/53baa002add4/micromachines-15-00357-g012.jpg
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https://cdn.ncbi.nlm.nih.gov/pmc/blobs/9699/10971855/53baa002add4/micromachines-15-00357-g012.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/9699/10971855/1f9656708308/micromachines-15-00357-g001.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/9699/10971855/fab2fcd748c4/micromachines-15-00357-g002.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/9699/10971855/e67a22b9f534/micromachines-15-00357-g003.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/9699/10971855/fec4512abf0f/micromachines-15-00357-g004.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/9699/10971855/080787d7ed77/micromachines-15-00357-g005.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/9699/10971855/4ccdfd35372c/micromachines-15-00357-g006.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/9699/10971855/5abc8814dd6a/micromachines-15-00357-g007.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/9699/10971855/98b85a8d109a/micromachines-15-00357-g008.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/9699/10971855/5c04c62e87a0/micromachines-15-00357-g009.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/9699/10971855/f030b0de9ba9/micromachines-15-00357-g010.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/9699/10971855/7feb1b97bbab/micromachines-15-00357-g011.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/9699/10971855/53baa002add4/micromachines-15-00357-g012.jpg

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