Gao Xu, Wen Jiajie, Wang Jiajia, Li Kaiwei
College of Instrumentation & Electrical Engineering, Jilin University, Changchun 130000, China.
School of Opto-Electronic Engineering, Changchun University of Science and Technology, Changchun 130022, China.
Sensors (Basel). 2022 Jun 30;22(13):4940. doi: 10.3390/s22134940.
Herein, a broadband ultrasensitive acoustic sensor based on an optical nanofiber coupler (ONC) attached to a diaphragm is designed and experimentally demonstrated. The ONC is sensitive to axial strain and works as the core transducing element to monitor the deformation of the diaphragm driven by acoustic waves. We first theoretically studied the sensing property of the ONC to axial strain and the deformation of the diaphragm. The results reveal that ONC working at the dispersion turning point (DTP) shows improved ultra-sensitivity towards axial strain, and the largest deformation of the circular diaphragm occurs at the center. Guided by the theoretical results, we fabricated an ONC with a DPT at 1550 nm, and we fixed one end of the ONC to the center of the diaphragm and the other end to the edge to construct the acoustic sensor. Finally, the experimental results show that the sensor can achieve accurate measurement in the broadband acoustic wave range of 30~20,000 Hz with good linearity. Specifically, when the input acoustic wave frequency is 120 Hz, the sensitivity reaches 1923 mV/Pa, the signal-to-noise ratio is 42.45 dB, and the minimum detectable sound pressure is 330 μPa/Hz. The sensor has the merits of simple structure, low cost, and high performance, and it provides a new method for acoustic wave detection.
在此,设计并通过实验演示了一种基于附着在膜片上的光学纳米光纤耦合器(ONC)的宽带超灵敏声学传感器。该ONC对轴向应变敏感,并作为核心传感元件来监测由声波驱动的膜片变形。我们首先从理论上研究了ONC对轴向应变的传感特性以及膜片的变形情况。结果表明,工作在色散转折点(DTP)的ONC对轴向应变表现出更高的超灵敏度,并且圆形膜片的最大变形发生在中心处。在理论结果的指导下,我们制作了一个在1550 nm处具有DTP的ONC,并将ONC的一端固定在膜片中心,另一端固定在边缘,以构建声学传感器。最后,实验结果表明,该传感器能够在30~20,000 Hz的宽带声波范围内实现准确测量,且具有良好的线性度。具体而言,当输入声波频率为120 Hz时,灵敏度达到1923 mV/Pa,信噪比为42.45 dB,最小可检测声压为330 μPa/Hz。该传感器具有结构简单、成本低和性能高的优点,为声波检测提供了一种新方法。