Liu Kaijun, Fan Junhao, Luo Binbin, Zou Xue, Wu Decao, Zou Xianglong, Shi Shenghui, Guo Yufeng, Zhao Mingfu
Opt Express. 2021 Oct 11;29(21):32983-32995. doi: 10.1364/OE.439959.
In the present work, we introduced a highly sensitive vibration sensor, which is based on the dispersion turning point (DTP) microfiber Mach-Zehnder interferometer. The axial strain and vibration sensing characteristics of the microfiber Mach-Zehnder interferometer were investigated. First, we theoretically analyzed the spectrum evolution characteristics of the microfiber Mach-Zehnder interferometer caused by axial strain. Second, the microfiber with different diameters was fabricated using the electrode discharge and fused taper method, and the axial strain experiments were conducted; the maximum sensitivity of the DTP microfiber with a diameter of ∼2.2 µm reached -45.55 pm/µɛ at ∼1550 nm. Finally, based on the axial strain principle of the microfiber, we designed a highly sensitive vibration sensor using a DTP microfiber integrated into a rectangular through-hole cantilever beam. The 30-3500 Hz vibration signal monitoring could be realized, the maximum signal-to-noise ratio (SNR) was ∼75 dB at 52 Hz, and the acceleration sensitivity reached as high as 0.764 V/g at 45Hz. These results suggested the high performance of the microfiber in axial strain and micro-vibration sensing fields.
在本工作中，我们介绍了一种基于色散转折点（DTP）微光纤马赫-曾德尔干涉仪的高灵敏度振动传感器。研究了微光纤马赫-曾德尔干涉仪的轴向应变和振动传感特性。首先，我们从理论上分析了轴向应变引起的微光纤马赫-曾德尔干涉仪的光谱演化特性。其次，采用电极放电和熔锥法制备了不同直径的微光纤，并进行了轴向应变实验；直径约为2.2 µm的DTP微光纤在约1550 nm处的最大灵敏度达到-45.55 pm/µɛ。最后，基于微光纤的轴向应变原理，我们设计了一种高灵敏度振动传感器，该传感器使用集成在矩形通孔悬臂梁中的DTP微光纤。可以实现30 - 3500 Hz的振动信号监测，在52 Hz时最大信噪比（SNR）约为75 dB，在45 Hz时加速度灵敏度高达0.764 V/g。这些结果表明微光纤在轴向应变和微振动传感领域具有高性能。
