Ivancic Justin, Alves Fabio
Department of Physics, Naval Postgraduate School, Monterey, CA 93943, USA.
Sensors (Basel). 2024 May 2;24(9):2908. doi: 10.3390/s24092908.
This paper reports on the design, modeling, and characterization of a multi-resonant, directional, MEMS acoustic sensor. The design builds on previous resonant MEMS sensor designs to broaden the sensor's usable bandwidth while maintaining a high signal-to-noise ratio (SNR). These improvements make the sensor more attractive for detecting and tracking sound sources with acoustic signatures that are broader than discrete tones. In-air sensor characterization was conducted in an anechoic chamber. The sensor was characterized underwater in a semi-anechoic pool and in a standing wave tube. The sensor demonstrated a cosine-like directionality, a maximum acoustic sensitivity of 47.6 V/Pa, and a maximum SNR of 88.6 dB, for 1 Pa sound pressure, over the bandwidth of the sensor circuitry (100 Hz-3 kHz). The presented design represents a significant improvement in sensor performance compared to similar resonant MEMS sensor designs. Increasing the sensitivity of a single-resonator design is typically associated with a decrease in bandwidth. This multi-resonant design overcomes that limitation.
本文报道了一种多谐振、定向MEMS声学传感器的设计、建模与特性。该设计基于先前的谐振MEMS传感器设计，在保持高信噪比（SNR）的同时拓宽了传感器的可用带宽。这些改进使该传感器在检测和跟踪具有比离散音调更宽声学特征的声源时更具吸引力。在消声室内对空气中的传感器进行了特性表征。该传感器在半消声水池和驻波管中进行了水下特性表征。在传感器电路的带宽（100 Hz - 3 kHz）内，对于1 Pa声压，该传感器表现出类似余弦的方向性、47.6 V/Pa的最大声学灵敏度以及88.6 dB的最大信噪比。与类似的谐振MEMS传感器设计相比，所展示的设计代表了传感器性能的显著提升。提高单谐振器设计的灵敏度通常会伴随着带宽的降低。这种多谐振设计克服了这一限制。
