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基于非接触加工的柔性平台运动与载荷分析

Motion and Load Analysis of the Flexible Platform Based on Noncontact Processing.

作者信息

Lin Chao, Jiang Mingdong, Xu Ping, Zheng Shan

机构信息

State Key Laboratory of Mechanical Transmission, Chongqing University, Chongqing 400030, China.

Chongqing Panlian Transmission Technology Co., Ltd., Chongqing 400060, China.

出版信息

Micromachines (Basel). 2022 Jun 24;13(7):988. doi: 10.3390/mi13070988.

DOI:10.3390/mi13070988
PMID:35888804
原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC9317106/
Abstract

In this paper, we explore the applicability of the positioning stage based on flexible hinges for noncontact processing. According to the actual application of the positioning stage, Hooke's law, the Euler-Bernoulli beam theory, and the geometric relationship of the structure are applied to analyze the coupled displacement in the movement of the positioning stage and the changes in the performance of the positioning stage caused by external loads. The coupled-displacement matrix and the external-load matrix obtained from the analysis are substituted into the ideal-displacement expression of the positioning stage to obtain the displacement expression of the platform in noncontact machining. The platform trajectory obtained by the referenced curve is analyzed. In addition, the coupled displacement in the X- and Y-directions and the coupled displacement caused by the external load in the Z-direction are nanoscales and about one-thousandth of the output displacement, which meets the requirement of tracking accuracy for micron-level machining. Finally, we use finite element analysis (FEA) and experiments to prove the correctness of the theoretical analysis.

摘要

在本文中，我们探讨了基于柔性铰链的定位平台在非接触加工中的适用性。根据定位平台的实际应用，应用胡克定律、欧拉-伯努利梁理论以及结构的几何关系，分析定位平台运动中的耦合位移以及外部载荷引起的定位平台性能变化。将分析得到的耦合位移矩阵和外部载荷矩阵代入定位平台的理想位移表达式，得到非接触加工中平台的位移表达式。分析了参考曲线得到的平台轨迹。此外，X和Y方向的耦合位移以及Z方向外部载荷引起的耦合位移为纳米级，约为输出位移的千分之一，满足微米级加工的跟踪精度要求。最后，我们使用有限元分析（FEA）和实验来证明理论分析的正确性。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/287f/9317106/5d4323a22c1c/micromachines-13-00988-g015.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/287f/9317106/430ed725e867/micromachines-13-00988-g001.jpg
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https://cdn.ncbi.nlm.nih.gov/pmc/blobs/287f/9317106/59daaadaa1ba/micromachines-13-00988-g005.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/287f/9317106/60f4e2147b44/micromachines-13-00988-g006.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/287f/9317106/c9c8e4d19280/micromachines-13-00988-g007.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/287f/9317106/b1fb9a3249bc/micromachines-13-00988-g008.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/287f/9317106/159f9b28dc19/micromachines-13-00988-g009.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/287f/9317106/14364e9692c9/micromachines-13-00988-g010.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/287f/9317106/7ea8fa95d508/micromachines-13-00988-g011.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/287f/9317106/3f3df2a8834c/micromachines-13-00988-g012.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/287f/9317106/1a83e303bd59/micromachines-13-00988-g013.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/287f/9317106/17bcd0f44571/micromachines-13-00988-g014.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/287f/9317106/5d4323a22c1c/micromachines-13-00988-g015.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/287f/9317106/430ed725e867/micromachines-13-00988-g001.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/287f/9317106/811f146a3257/micromachines-13-00988-g002.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/287f/9317106/ce69b03359eb/micromachines-13-00988-g003.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/287f/9317106/9be9345bcd7b/micromachines-13-00988-g004.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/287f/9317106/59daaadaa1ba/micromachines-13-00988-g005.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/287f/9317106/60f4e2147b44/micromachines-13-00988-g006.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/287f/9317106/c9c8e4d19280/micromachines-13-00988-g007.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/287f/9317106/b1fb9a3249bc/micromachines-13-00988-g008.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/287f/9317106/159f9b28dc19/micromachines-13-00988-g009.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/287f/9317106/14364e9692c9/micromachines-13-00988-g010.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/287f/9317106/7ea8fa95d508/micromachines-13-00988-g011.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/287f/9317106/3f3df2a8834c/micromachines-13-00988-g012.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/287f/9317106/1a83e303bd59/micromachines-13-00988-g013.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/287f/9317106/17bcd0f44571/micromachines-13-00988-g014.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/287f/9317106/5d4323a22c1c/micromachines-13-00988-g015.jpg

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本文引用的文献

1
Dynamic Analysis and Experiment of 6-DOF Compliant Platform Based on Bridge-Type Amplifier.基于桥式放大器的六自由度柔性平台动力学分析与实验
Micromachines (Basel). 2020 Nov 23;11(11):1024. doi: 10.3390/mi11111024.