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基于桥式放大器的六自由度柔性平台动力学分析与实验

Dynamic Analysis and Experiment of 6-DOF Compliant Platform Based on Bridge-Type Amplifier.

作者信息

Lin Chao, Zheng Shan, Jiang Mingdong

机构信息

State Key Laboratory of Mechanical Transmission, Chongqing University, Chongqing 400030, China.

出版信息

Micromachines (Basel). 2020 Nov 23;11(11):1024. doi: 10.3390/mi11111024.

DOI:10.3390/mi11111024
PMID:33238604
原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC7700207/
Abstract

In this paper, we establish a dynamic model of a six-degrees-of-freedom (6-DOF) compliant positioning platform based on bridge-type amplifiers. Based on the elastic beam theory and energy relationship, we derived the bridge-type amplifier's dynamic model using the Lagrange equation. Then, we established a dynamic model of the compliant platform based on the equivalent mass and equivalent stiffness of the bridge-type amplifier, and the analysis formula of the natural frequency was derived. Finally, the analytical models of natural frequencies of the bridge-type amplifier and the compliant platforms were verified using the finite element analysis (FEA) method. Through modal experiments, the damping ratio and natural frequency were identified. Step response experiments in the X/Y direction and Z direction were performed. The phenomenon that the experimental results appeared to match the theoretical calculations indicates that the dynamic model was accurate.

摘要

在本文中，我们建立了基于桥式放大器的六自由度（6-DOF）柔顺定位平台的动力学模型。基于弹性梁理论和能量关系，我们使用拉格朗日方程推导了桥式放大器的动力学模型。然后，基于桥式放大器的等效质量和等效刚度建立了柔顺平台的动力学模型，并推导了固有频率的解析公式。最后，使用有限元分析（FEA）方法验证了桥式放大器和柔顺平台固有频率的解析模型。通过模态实验，确定了阻尼比和固有频率。在X/Y方向和Z方向进行了阶跃响应实验。实验结果与理论计算结果相符的现象表明该动力学模型是准确的。

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本文引用的文献

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Micromachines (Basel). 2019 Jul 29;10(8):502. doi: 10.3390/mi10080502.
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Stiffness modeling of compliant parallel mechanisms and applications in the performance analysis of a decoupled parallel compliant stage.柔顺并联机构的刚度建模及其在解耦并联柔顺平台性能分析中的应用
Rev Sci Instrum. 2015 Sep;86(9):095109. doi: 10.1063/1.4930884.
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Development of flexure based 6-degrees of freedom parallel nano-positioning system with large displacement.
Micromachines (Basel). 2022 Jun 24;13(7):988. doi: 10.3390/mi13070988.
基于挠曲的大位移六自由度并联纳米定位系统的研制。
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