通过飞秒激光直写结合柱面透镜在氧化铟锡薄膜上高效制备规则周期性表面结构

Regular Periodic Surface Structures on Indium Tin Oxide Film Efficiently Fabricated by Femtosecond Laser Direct Writing with a Cylindrical Lens.

作者信息

Chen Long, Yang Jian, Jiang Qilin, Cao Kaiqiang, Liu Jukun, Jia Tianqing, Sun Zhenrong, Xu Hongxing

机构信息

State Key Laboratory of Precision Spectroscopy, School of Physics and Electronic Science, East China Normal University, Shanghai 200062, China.

College of Science, Shanghai Institute of Technology, Shanghai 201418, China.

出版信息

Materials (Basel). 2022 Jul 22;15(15):5092. doi: 10.3390/ma15155092.

DOI:10.3390/ma15155092

PMID:35897528

原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC9329999/

Abstract

Regular laser-induced periodic surface structures (LIPSS) were efficiently fabricated on indium tin oxide (ITO) films by femtosecond laser direct writing with a cylindrical lens. It was found that randomly distributed nanoparticles and high spatial frequency LIPSSs (HSFL) formed on the surface after a small number of cumulative incident laser pulses per spot, and regular low spatial frequency LIPSSs (LSFL) appeared when more laser pulses accumulated. The mechanism of the transition was studied by real-time absorptance measurement and theoretical simulation. Results show that the interference between incident laser and surface plasmon polaritons (SPPs) excited by random surface scatterers facilitates the formation of prototype LSFLs, which in turn enhances light absorption and SPP excitation following laser pulses. The effects of scanning velocity and laser fluence on LSFL quality were discussed in detail. Moreover, large-area extremely regular LSFL with a diameter of 30 mm were efficiently fabricated on an ITO film by femtosecond laser direct writing with the cylindrical lens. The fabricated LSFLs on the ITO film demonstrate vivid structural color. During LSFL processing, the decrease of ITO film thickness leads to the increase of near-infrared optical transmittance.

摘要

通过使用柱面透镜的飞秒激光直写技术，在氧化铟锡（ITO）薄膜上高效制备了规则的激光诱导周期性表面结构（LIPSS）。研究发现，在每个光斑经过少量累积入射激光脉冲后，表面会形成随机分布的纳米颗粒和高空间频率LIPSSs（HSFL），而当累积更多激光脉冲时，规则的低空间频率LIPSSs（LSFL）出现。通过实时吸收率测量和理论模拟研究了这种转变的机制。结果表明，入射激光与由随机表面散射体激发的表面等离激元极化激元（SPP）之间的干涉促进了原型LSFL的形成，这反过来又增强了后续激光脉冲后的光吸收和SPP激发。详细讨论了扫描速度和激光能量密度对LSFL质量的影响。此外，通过使用柱面透镜的飞秒激光直写技术，在ITO薄膜上高效制备了直径为30 mm的大面积极其规则的LSFL。在ITO薄膜上制备的LSFL呈现出鲜艳的结构色。在LSFL加工过程中，ITO薄膜厚度的减小导致近红外光透射率增加。