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飞秒激光辅助湿法蚀刻实现的定制表面双折射

Tailored surface birefringence by femtosecond laser assisted wet etching.

作者信息

Drevinskas Rokas, Gecevičius Mindaugas, Beresna Martynas, Bellouard Yves, Kazansky Peter G

出版信息

Opt Express. 2015 Jan 26;23(2):1428-37. doi: 10.1364/OE.23.001428.

DOI:10.1364/OE.23.001428
PMID:25835901
Abstract

Surface texturing is demonstrated by the combination of wet etching and ultrafast laser nanostructuring of silica glass. Using potassium hydroxide (KOH) at room temperature as an etchant of laser modified glass, we show the polarization dependent linear increase in retardance reaching a threefold value within 25 hours. The dispersion control of birefringence by the etching procedure led to achromatic behaviour over the entire visible spectral range. The mechanism of enhanced KOH etching selectivity after femtosecond laser exposure is discussed and correlated to the formation of various laser-induced defects, such as silicon-rich oxygen deficiency and color centers.

摘要

通过对石英玻璃进行湿法蚀刻和超快激光纳米结构化相结合的方式,展示了表面纹理化。在室温下使用氢氧化钾(KOH)作为激光改性玻璃的蚀刻剂,我们发现延迟随偏振呈现线性增加,在25小时内达到三倍的值。蚀刻过程对双折射的色散控制导致在整个可见光谱范围内呈现消色差行为。讨论了飞秒激光曝光后KOH蚀刻选择性增强的机制,并将其与各种激光诱导缺陷的形成相关联,如富硅氧缺陷和色心。

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