Elaissi Samira, Trabelsi Amira Ben Gouider, Alkallas Fatemah H, Alrebdi Tahani A, Charrada Kamel
Department of Physics, College of Science, Princess Nourah Bint Abdulrahman University, P.O. Box 84428, Riyadh 11671, Saudi Arabia.
Research Unit of Ionized Backgrounds and Reagents Studies (UEMIR), Preparatory Institute for Engineering Studies of Monastir (IPEIM), University of Monastir, Kairouan Street, Monastir 5019, Tunisia.
Materials (Basel). 2022 Jul 28;15(15):5213. doi: 10.3390/ma15155213.
In this research, we studied the performance analysis of inductively coupled radiofrequency plasma "RF-ICP" torch used in multi-material processing. A 2D numerical model built with COMSOL Multiphysics was used to study the discharge behavior and evaluate the overall efficiency transmitted into the plasma system. The temperature and velocity flow of the plasma were investigated. The numerical results are consistent with previous experimental studies. The temperature and velocity profiles are represented under a wide range of RF power and for different sheath gas flow rates. With increasing power, the radial peak temperature typically shifts towards the wall. The resistance of the torch rises whereas the inductance diminishes with increasing RF power. The overall dependency of the coupling efficiency to the RF power is also estimated. The stabilization of the plasma flow dependency to the sheath swirl flow was investigated. The incorporation of Helium (0.02%) into an Argon gas was established to minimize the energy lost in the sidewall. The number and spacing of induction coil numbers affects the temperature and flow field distribution. A valuable approach to designing and optimizing the induction plasma system is presented in the proposed study. The obtained results are fundamental to specify ICP torch design criteria needed for multi-material processing.
在本研究中，我们对用于多材料加工的电感耦合射频等离子体“RF - ICP”炬进行了性能分析。使用基于COMSOL Multiphysics构建的二维数值模型来研究放电行为，并评估传输到等离子体系统中的整体效率。研究了等离子体的温度和速度流。数值结果与先前的实验研究一致。给出了在广泛的射频功率范围和不同的鞘层气体流速下的温度和速度分布。随着功率增加，径向峰值温度通常会向壁面移动。炬的电阻增加，而电感随着射频功率的增加而减小。还估计了耦合效率对射频功率的总体依赖性。研究了等离子体流对鞘层旋流依赖性的稳定性。确定了将氦气（0.02%）混入氩气中以最小化侧壁中的能量损失。感应线圈的数量和间距会影响温度和流场分布。在所提出的研究中给出了一种设计和优化感应等离子体系统的有价值方法。所获得的结果对于确定多材料加工所需的ICP炬设计标准至关重要。
