Meteling Henning J, Bosse Florian, Schlichter Lisa, Tyler Bonnie J, Arlinghaus Heinrich F, Ravoo Bart Jan
Center for Soft Nanoscience and Organic Chemistry Institute, Westfälische Wilhelms-Universität Münster, Busso-Peus-Str. 10, 48149, Münster, Germany.
Center for Soft Nanoscience and Physics Institute, Westfälische Wilhelms-Universität Münster, Busso-Peus-Str. 10, 48149, Münster, Germany.
Small. 2022 Sep;18(37):e2203245. doi: 10.1002/smll.202203245. Epub 2022 Aug 15.
Surface patterning of functional materials is a key technology in various fields such as microelectronics, optics, and photonics. In micro- and nanofabrication, polymers are frequently employed either as photoreactive or thermoresponsive resists that enable further fabrication steps, or as functional adlayers in electronic and optical devices. In this article, a method is presented for imprint lithography using low molecular weight arylazoisoxazoles photoswitches instead of polymer resists. These photoswitches exhibit a rapid and reversible solid-to-liquid phase transition upon photo-isomerization at room temperature, making them highly suitable for reversible surface functionalization at ambient conditions. Beyond photo-induced imprint lithography with multiple write-and-erase cycles, prospective applications as patterned matrix for nanoparticles and etch resist on gold surfaces are demonstrated.
功能材料的表面图案化是微电子、光学和光子学等各个领域的关键技术。在微纳制造中,聚合物经常被用作光反应性或热响应性抗蚀剂,以实现进一步的制造步骤,或者用作电子和光学器件中的功能附加层。在本文中,提出了一种使用低分子量芳基偶氮异恶唑光开关而非聚合物抗蚀剂的压印光刻方法。这些光开关在室温下光异构化时表现出快速且可逆的固-液相转变,使其非常适合在环境条件下进行可逆表面功能化。除了具有多个写入和擦除循环的光诱导压印光刻之外,还展示了其作为纳米颗粒的图案化基质和金表面蚀刻抗蚀剂的潜在应用。