Cui Danying, Liu Jin, Yang Haima
School of Electronic and Electrical Engineering, Shanghai University of Engineering Science, Shanghai 201620, China.
School of Optical-Electrical and Computer Engineering, University of Shanghai for Science and Technology, Shanghai 200093, China.
Comput Intell Neurosci. 2022 Sep 1;2022:8446093. doi: 10.1155/2022/8446093. eCollection 2022.
In order to optimize the sensitivity and detection accuracy of Fano resonance optical sensors, a sensing model of graphene-grating composite micro-nanostructure with high sensing performance is proposed based on the optical properties of graphene and grating. By studying the reflection spectra and field distribution characteristics of the structure, the sensing mechanism of Fano resonance generated by the structure is elaborated, and the parameters affecting the Fano resonance sensing performance are analyzed to enhance the Fano resonance sensing performance by optimizing the structural parameters, and the Fano resonance reflection spectral curve with high-sensitivity and high-quality factor (FOM) value is obtained. The results show that when the grating period =300 nm, the grating height 1 = 110 nm, and the silver film thickness 2 = 30 nm, the sensitivity of the structure is 980 nm/RIU and the quality factor FOM is 770RIU by changing the refractive index of the material to be measured.
为了优化法诺共振光学传感器的灵敏度和检测精度，基于石墨烯和光栅的光学特性，提出了一种具有高传感性能的石墨烯-光栅复合微纳结构传感模型。通过研究该结构的反射光谱和场分布特性，阐述了该结构产生法诺共振的传感机制，分析了影响法诺共振传感性能的参数，通过优化结构参数来提高法诺共振传感性能，得到了具有高灵敏度和高品质因数（FOM）值的法诺共振反射光谱曲线。结果表明，当光栅周期 =300 nm，光栅高度1 = 110 nm，银膜厚度2 = 30 nm时，通过改变待测材料的折射率，该结构的灵敏度为980 nm/RIU，品质因数FOM为770RIU。
