Huang Yu-Chen, Zhou Junze, Nomenyo Komla, Ionescu Rodica Elena, Gokarna Anisha, Lerondel Gilles
Laboratory of Light, Nanomaterials and Nanotechnologies (L2n), CNRS ERL 7004, University of Technology of Troyes 12 rue Marie Curie BP 2060 10004 Troyes France
Nanoscale Adv. 2020 Oct 8;2(11):5288-5295. doi: 10.1039/d0na00434k. eCollection 2020 Nov 11.
ZnO is a highly promising, multifunctional nanomaterial having various versatile applications in the fields of sensors, optoelectronics, photovoltaics, photocatalysts and water purification. However, the real challenge lies in producing large scale, well-aligned, highly reproducible ZnO nanowires (NWs) using low cost techniques. This large-scale production of ZnO NWs has stunted the development and practical usage of these NWs in fast rising fields such as photocatalysis or in photovoltaic applications. The present article shows an effective, simple approach for the uniform, aligned growth of ZnO NWs on entire silicon wafers (sizes 3 or 4 inches), using a low-temperature Chemical Bath Deposition (CBD) technique. In addition to this, a systematic study of the substrate size dependent growth of NWs has been conducted to better understand the effect of the limitation in the deposition rate of Zn ions on the growth of NWs. The growth rate of ZnO NWs is seen to have a strong relationship with the substrate size. Also, the loading efficiency of the Zn ions is higher in ZnO NWs grown on a 3-inch silicon wafer in comparison to those grown on a small piece. An in-depth time dependent growth study conducted on entire 3-inch wafers to track the morphological evolution (length, diameter and number of the NWs) reveals that the growth rate of the length of the NWs reaches a saturation state in a short time span of 20 min. Assessment of the overall homogeneity of the NWs grown on the 3-inch wafer and simultaneous growth on two entire 4-inch silicon wafers has also been demonstrated in this article. This demonstration of large-scale, well-aligned controllable, aligned growth of ZnO NWs on entire silicon wafers is a first step towards NW based devices especially for applications such as photovoltaic, water purification, photocatalysis or biomedical applications.
氧化锌是一种极具前景的多功能纳米材料,在传感器、光电子学、光伏、光催化剂及水净化等领域有着广泛的应用。然而,真正的挑战在于采用低成本技术大规模生产排列整齐、高度可重现的氧化锌纳米线(NWs)。氧化锌纳米线的这种大规模生产阻碍了它们在光催化或光伏应用等快速发展领域的开发和实际应用。本文展示了一种有效且简单的方法,即使用低温化学浴沉积(CBD)技术,在整个硅片(尺寸为3英寸或4英寸)上实现氧化锌纳米线的均匀、排列生长。除此之外,还对纳米线的生长与衬底尺寸的关系进行了系统研究,以更好地理解锌离子沉积速率的限制对纳米线生长的影响。结果表明,氧化锌纳米线的生长速率与衬底尺寸有很强的关系。此外,与在小块硅片上生长的氧化锌纳米线相比,在3英寸硅片上生长的纳米线中锌离子的负载效率更高。对整个3英寸硅片进行的深入的时间依赖性生长研究,以追踪形态演变(纳米线的长度、直径和数量),结果显示纳米线长度的生长速率在短短20分钟的时间跨度内就达到了饱和状态。本文还展示了对在3英寸硅片上生长的纳米线的整体均匀性评估,以及在两个完整的4英寸硅片上同时生长的情况。在整个硅片上大规模、排列可控、整齐地生长氧化锌纳米线的这一展示,是迈向基于纳米线的器件的第一步,特别是对于光伏、水净化、光催化或生物医学应用等领域。