Rotunno E, Bosi M, Seravalli L, Salviati G, Fabbri F
Istituto Nanoscienze-CNR via G Campi 213/a 41125 Modena Italy.
IMEM-CNR Area delle Scienze 37A 43124 Parma Italy.
Nanoscale Adv. 2020 Apr 13;2(6):2352-2362. doi: 10.1039/d0na00147c. eCollection 2020 Jun 17.
Chemical vapor deposition has been demonstrated to be the most efficient, versatile and reliable technique for the synthesis of monolayers of transition metal dichalcogenides. The use of organic promoters during the growth process was a turning point in order to increase the monolayer lateral size or to obtain complete coverage of the growth substrate. In this work we clarify the influence of the promoter gradient on the growth dynamics of MoS. In particular, we place a sacrificial substrate covered with a promoter (a low sublimation-temperature perylene-based compound) downstream with respect to the growth substrate in order to maximize its gradient on the growth substrate through upstream diffusion. We demonstrate that the morphology and the number of layers of MoS are drastically affected by the distance of the growth substrate from the promoter sacrificial substrate. The farthermost area from the promoter substrate presents micrometric MoS triangular monolayers and large low hierarchy dendritic multi-layer structures. On the contrary the closest area reveals an almost continuous polycrystalline MoS monolayer, with bilayer terraces, with a lateral dimension up to hundreds of micrometers.
化学气相沉积已被证明是合成过渡金属二硫属化物单层最有效、最通用和最可靠的技术。在生长过程中使用有机促进剂是一个转折点,以增加单层的横向尺寸或实现生长衬底的完全覆盖。在这项工作中,我们阐明了促进剂梯度对MoS生长动力学的影响。具体而言,我们在生长衬底下游放置一个覆盖有促进剂(一种低升华温度的苝基化合物)的牺牲衬底,以便通过上游扩散使其在生长衬底上的梯度最大化。我们证明,MoS的形态和层数受到生长衬底与促进剂牺牲衬底距离的显著影响。离促进剂衬底最远的区域呈现出微米级的MoS三角形单层和大型低层次树枝状多层结构。相反,最接近的区域则显示出几乎连续的多晶MoS单层,带有双层平台,横向尺寸可达数百微米。