Guo Jingkun, Gröblacher Simon
Kavli Institute of Nanoscience, Department of Quantum Nanoscience, Delft University of Technology, 2628CJ, Delft, The Netherlands.
Light Sci Appl. 2022 Sep 28;11(1):282. doi: 10.1038/s41377-022-00966-7.
The rapid development of high-Q macroscopic mechanical resonators has enabled great advances in optomechanics. Further improvements could allow for quantum-limited or quantum-enhanced applications at ambient temperature. Some of the remaining challenges include the integration of high-Q structures on a chip, while simultaneously achieving large coupling strengths through an optical read-out. Here, we present a versatile fabrication method, which allows us to build fully integrated optomechanical structures. We place a photonic crystal cavity directly above a mechanical resonator with high-Q fundamental out-of-plane mode, separated by a small gap. The highly confined optical field has a large overlap with the mechanical mode, enabling strong optomechanical interaction strengths. Furthermore, we implement a novel photonic crystal design, which allows for a very large cavity photon number, a highly important feature for optomechanical experiments and sensor applications. Our versatile approach is not limited to our particular design but allows for integrating an out-of-plane optical read-out into almost any device layout. Additionally, it can be scaled to large arrays and paves the way to realizing quantum experiments and applications with mechanical resonators based on high-Q out-of-plane modes alike.
高品质宏观机械谐振器的快速发展推动了光力学的巨大进步。进一步的改进有望在室温下实现量子极限或量子增强应用。一些尚存的挑战包括在芯片上集成高品质结构，同时通过光学读出实现大的耦合强度。在此，我们提出一种通用的制造方法，它使我们能够构建完全集成的光机械结构。我们将一个光子晶体腔直接置于具有高品质面外基模的机械谐振器上方，两者由一个小间隙隔开。高度受限的光场与机械模式有很大的重叠，从而实现强大的光机械相互作用强度。此外，我们实施了一种新颖的光子晶体设计，它允许有非常大的腔光子数，这对于光力学实验和传感器应用是一个非常重要的特性。我们的通用方法不限于我们的特定设计，而是允许将面外光学读出集成到几乎任何器件布局中。此外，它可以扩展到大型阵列，并为基于高品质面外模式的机械谐振器实现量子实验和应用铺平道路。
