Feng Fei, Jia Pinggang, Qian Jiang, Hu Zhengpeng, An Guowen, Qin Li
Science and Technology on Electronic Test and Measurement Laboratory, North University of China, Taiyuan 030051, China.
Micromachines (Basel). 2021 May 28;12(6):623. doi: 10.3390/mi12060623.
This paper proposes a high-temperature optical fiber Fabry-Perot pressure sensor based on the micro-electro-mechanical system (MEMS). The sensing structure of the sensor is composed of Pyrex glass wafer and silicon wafer manufactured by mass micromachining through anodic bonding process. The separated sensing head and the gold-plated fiber are welded together by a carbon dioxide laser to form a fiber-optic Fabry-Perot high temperature pressure sensor, which uses a four-layer bonding technology to improve the sealing performance of the Fabry-Perot cavity. The test system of high temperature pressure sensor is set up, and the experimental data obtained are calculated and analyzed. The experimental results showed that the maximum linearity of the optical fiber pressure sensor was 1% in the temperature range of 20-400 °C. The pressure sensor exhibited a high linear sensitivity of about 1.38 nm/KPa at room temperature at a range of pressures from approximarely 0-to 1 MPa. The structure of the sensor is characterized by high consistency, which makes the structure more compact and the manufacturing process more controllable.
本文提出了一种基于微机电系统（MEMS）的高温光纤法布里 - 珀罗压力传感器。该传感器的传感结构由派热克斯玻璃晶圆和硅晶圆组成，通过阳极键合工艺采用批量微加工制造。分离的传感头和镀金光纤通过二氧化碳激光器焊接在一起，形成光纤法布里 - 珀罗高温压力传感器，其采用四层键合技术来提高法布里 - 珀罗腔的密封性能。搭建了高温压力传感器测试系统，并对获得的实验数据进行计算和分析。实验结果表明，在20 - 400℃温度范围内，光纤压力传感器的最大线性度为1%。在室温下，压力范围约为0至1MPa时，压力传感器表现出约1.38nm/KPa的高线性灵敏度。该传感器结构具有高度一致性，使得结构更紧凑，制造过程更可控。
