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数控机床中五自由度主轴误差运动的同步测量。

Simultaneous measurement of 5DOF spindle error motions in CNC machine tools.

作者信息

Jia Peizhi, Li Peng, Zheng Fajia, Feng Qibo, Zhang Bin

出版信息

Appl Opt. 2022 Jul 1;61(19):5704-5713. doi: 10.1364/AO.456727.

Abstract

We present a method for the simultaneous measurement of 5 degree-of-freedom (DOF) spindle error motions in computer numerical control (CNC) machine tools and develop a measurement system. The measurement system uses polarization-maintaining fiber coupled with a dual-frequency laser as the light source. The axial error motion of the spindle is measured by heterodyne interferometry, and other 4DOF error motions are obtained by collimation measurement. Based on the measurement system, a comprehensive measurement model of spindle error motion was established. The influence of system error on the measurement accuracy of the spindle tilt error motion and radial error motion was analyzed. According to the measurement model, a corresponding data-processing method is proposed, which removes some systematic errors. A series of experiments was conducted to verify the feasibility and effectiveness of the proposed measurement system and the corresponding measurement model.

摘要

我们提出了一种用于同时测量计算机数控(CNC)机床中五自由度(DOF)主轴误差运动的方法,并开发了一种测量系统。该测量系统使用保偏光纤与双频激光器耦合作为光源。主轴的轴向误差运动通过外差干涉测量法进行测量,其他四自由度误差运动通过准直测量获得。基于该测量系统,建立了主轴误差运动的综合测量模型。分析了系统误差对主轴倾斜误差运动和径向误差运动测量精度的影响。根据测量模型,提出了一种相应的数据处理方法,该方法消除了一些系统误差。进行了一系列实验,以验证所提出的测量系统和相应测量模型的可行性和有效性。

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