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用于超精密光学表面的磁性纳米颗粒基纳米磨料的抛光性能

Polishing performance of a magnetic nanoparticle-based nanoabrasive for superfinish optical surfaces.

作者信息

Amir Md, Mishra Vinod, Sharma Rohit, Ali Syed Wazed, Khan Gufran Sayeed

出版信息

Appl Opt. 2022 Jun 10;61(17):5179-5188. doi: 10.1364/AO.456819.

Abstract

Superfine optical components are necessary for advanced engineering applications such as x-ray optics, high-power lasers, lithography, synchrotron optics, laser-based sensors, etc. Fabrication of such superfine surfaces is one of the major challenges for optical and semiconductor industries. This research focuses on the development of a magnetic nanoparticle-based nanoabrasive for superfine optical polishing. The superparamagnetic iron oxide nanoparticle (SPION)-based nanoabrasive is synthesized via a hydrothermal route by employing cost-effective precursors. Detailed characterizations of the prepared nanoabrasive are presented. Transmission electron microscopy results confirm the irregular cubic and spherical shaped morphology of the SPION nanoabrasive along with particle size distribution varying from 10-60 nm, enabling the homogenous cutting effect of the aqueous slurry for polishing. Furthermore, the high surface area and pore size are determined by Brunauer-Emmet-Teller analysis and found to be 30.98/ and 6.13 nm, respectively, providing homogenous distribution of the nanoabrasive on the surface of a BK7 substrate for material removal. Application of the developed SPION abrasive is demonstrated for superfinish optical polishing on a BK7 optical disc. The experimental polishing results show superfine surface finishing with an average roughness value of 3.5 Å. The superparamagnetic property of the developed nanoabrasive is confirmed by alternative gradient magnetometry, and it helps in recovering the used nanoabrasive after polishing. Moreover, the polishing performance of the SPION nanoabrasives is compared with a cerium nanoabrasive, which is also synthesized in this study.

摘要

超细光学元件对于诸如X射线光学、高功率激光器、光刻技术、同步加速器光学、基于激光的传感器等先进工程应用而言是必不可少的。制造此类超细表面是光学和半导体行业面临的主要挑战之一。本研究聚焦于开发一种用于超细光学抛光的基于磁性纳米颗粒的纳米磨料。通过采用具有成本效益的前驱体,经由水热法合成了基于超顺磁性氧化铁纳米颗粒(SPION)的纳米磨料。给出了所制备纳米磨料的详细表征。透射电子显微镜结果证实了SPION纳米磨料呈不规则立方和球形形态,粒径分布在10 - 60纳米之间,使得水性浆料在抛光时能产生均匀的切削效果。此外,通过布鲁诺尔 - 埃米特 - 泰勒分析确定了高比表面积和孔径,分别为30.98/和6.13纳米,这使得纳米磨料能在BK7衬底表面均匀分布以实现材料去除。展示了所开发的SPION磨料在BK7光盘上进行超精密光学抛光的应用。实验抛光结果显示表面超精密加工,平均粗糙度值为3.5 Å。通过交变梯度磁力测量法证实了所开发纳米磨料的超顺磁性,这有助于在抛光后回收用过的纳米磨料。此外,还将SPION纳米磨料的抛光性能与本研究中也合成的铈纳米磨料进行了比较。

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