Xin Chenguang, Yang Zhiyong, Qi Jie, Niu Qianqi, Ma Xiaochen, Fan Changjiang, Li Mengwei
Opt Express. 2022 Oct 24;30(22):40009-40017. doi: 10.1364/OE.471354.
Based on Talbot effect of optical microgratings, we report an ultra-compact sensor for displacement and vibration measurement with resolution down to sub-nanometer level. With no need of optical components such as reflectors, splitters, polarizers, and wave plates, the proposed sensor based on a common-path structure shows a high compactness. Using gratings with period of 3 µm, displacement measurement within a range of 1 mm is demonstrated experimentally. Associated with an interpolation circuit with subdividing factor of 4096, a resolution of 0.73 nm is obtained. The experimental results also show the ability for the sensor to detect in-plane vibration with frequency below 900 Hz. With a sub-nanometer resolution and an ultra-compact structure, the miniature sensor shows potential in applications such as high-precision machinery manufacturing and semiconductor processing.
基于光学微光栅的塔尔博特效应，我们报道了一种用于位移和振动测量的超紧凑型传感器，其分辨率可达亚纳米级别。所提出的基于共光路结构的传感器无需反射镜、分光器、偏振器和波片等光学元件，具有高度的紧凑性。通过使用周期为3 µm的光栅，实验展示了在1 mm范围内的位移测量。结合细分因子为4096的插值电路，获得了0.73 nm的分辨率。实验结果还表明该传感器能够检测频率低于900 Hz的面内振动。这种微型传感器具有亚纳米分辨率和超紧凑结构，在高精度机械制造和半导体加工等应用中显示出潜力。
