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基于缺级塔尔博特效应的位移测量

Displacement Measurement Based on the Missing-Order Talbot Effect.

作者信息

Song Liuxing, Zhao Kailun, Wang Xiaoyong, He Jinping, Tian Guoliang, Yang Shihua, Li Yaning

机构信息

College of Astronautics, Nanjing University of Aeronautics and Astronautics, Nanjing 211106, China.

Beijing Institute of Space Mechanics and Electricity, Beijing 100081, China.

出版信息

Sensors (Basel). 2025 Jan 6;25(1):292. doi: 10.3390/s25010292.

DOI:10.3390/s25010292
PMID:39797083
原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC11723465/
Abstract

Displacement measurement is a crucial application, with laser-based methods offering high precision and being well established in commercial settings. However, these methods often come with the drawbacks of significant size and exorbitant costs. We introduce a novel displacement measurement method that utilizes the missing-order Talbot effect. This approach circumvents the need to measure contrast in the Talbot diffraction field, opting instead to leverage the displacement within the missing-order Talbot diffraction pattern. Our method only requires parallel light, an amplitude grating, and a detector to achieve displacement measurement. The measurement dynamic range can be adjusted by altering the grating period and the wavelength of the incident light. Through careful simulation and experimental validation, our method exhibits a correlation coefficient surpassing 0.999 across a 30 mm dynamic range and achieves a precision superior to 3 μm.

摘要

位移测量是一项关键应用,基于激光的方法具有高精度且在商业环境中已得到广泛应用。然而,这些方法往往存在体积庞大和成本过高的缺点。我们引入了一种利用缺级塔尔博特效应的新型位移测量方法。这种方法无需测量塔尔博特衍射场中的对比度,而是选择利用缺级塔尔博特衍射图案内的位移。我们的方法仅需平行光、一个振幅光栅和一个探测器即可实现位移测量。测量动态范围可通过改变光栅周期和入射光波长来调整。通过精心的模拟和实验验证,我们的方法在30毫米动态范围内的相关系数超过0.999,精度优于3微米。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/454e/11723465/7bd8b37eb460/sensors-25-00292-g009.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/454e/11723465/c0e3aa06299d/sensors-25-00292-g001.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/454e/11723465/75c5b0c3d54e/sensors-25-00292-g002.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/454e/11723465/bd47c450246b/sensors-25-00292-g003.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/454e/11723465/af5e52c8cd1b/sensors-25-00292-g004.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/454e/11723465/afc60ec6cf8a/sensors-25-00292-g005.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/454e/11723465/e4bd7c9c37ca/sensors-25-00292-g006.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/454e/11723465/982af734dcc3/sensors-25-00292-g007.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/454e/11723465/3551b97e8e23/sensors-25-00292-g008.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/454e/11723465/7bd8b37eb460/sensors-25-00292-g009.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/454e/11723465/c0e3aa06299d/sensors-25-00292-g001.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/454e/11723465/75c5b0c3d54e/sensors-25-00292-g002.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/454e/11723465/bd47c450246b/sensors-25-00292-g003.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/454e/11723465/af5e52c8cd1b/sensors-25-00292-g004.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/454e/11723465/afc60ec6cf8a/sensors-25-00292-g005.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/454e/11723465/e4bd7c9c37ca/sensors-25-00292-g006.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/454e/11723465/982af734dcc3/sensors-25-00292-g007.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/454e/11723465/3551b97e8e23/sensors-25-00292-g008.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/454e/11723465/7bd8b37eb460/sensors-25-00292-g009.jpg

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本文引用的文献

1
High-Precision Two-Dimensional Angular Sensor Based on Talbot Effect.基于塔尔博特效应的高精度二维角度传感器
Sensors (Basel). 2024 Nov 17;24(22):7333. doi: 10.3390/s24227333.
2
Ultra-compact displacement and vibration sensor with a sub-nanometric resolution based on Talbot effect of optical microgratings.基于光学微光栅塔尔博特效应的具有亚纳米分辨率的超紧凑型位移和振动传感器。
Opt Express. 2022 Oct 24;30(22):40009-40017. doi: 10.1364/OE.471354.
3
Shifted band-extended angular spectrum method for off-axis diffraction calculation.用于离轴衍射计算的移位带扩展角谱方法。
Opt Express. 2021 Mar 29;29(7):10089-10103. doi: 10.1364/OE.419096.
4
Fabrication of three-dimensional high-aspect-ratio structures by oblique-incidence Talbot lithography.通过斜入射塔尔博特光刻技术制造三维高纵横比结构。
Opt Express. 2020 Nov 23;28(24):36924-36935. doi: 10.1364/OE.410965.
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Influence of oblique illumination on perfect Talbot imaging and nearly perfect self-imaging for gratings beyond five diffraction orders.
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Long focal-length measurement using divergent beam and two gratings of different periods.
Opt Express. 2014 Nov 17;22(23):27921-31. doi: 10.1364/OE.22.027921.
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Electro-optical processor for measuring displacement employing the Talbot and the nonsteady-state photo-electromotive force effects.利用泰伯效应和非稳态光生电动势效应的位移测量电光处理器。
Opt Lett. 2014 Jan 1;39(1):104-7. doi: 10.1364/OL.39.000104.
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Appl Opt. 1971 Aug 1;10(8). doi: 10.1364/AO.10.1980_1.
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