School of Chemical Engineering & Technology, Xi'an Jiaotong University, Xi'an, 710049, People's Republic of China.
Division of Medicinal Chemistry, Pfizer Boulder Research & Development, Boulder, Colorado80301, United States.
ACS Nano. 2022 Nov 22;16(11):17778-17801. doi: 10.1021/acsnano.2c08650. Epub 2022 Nov 10.
Microelectromechanical-system (MEMS)-based semiconductor gas sensors are considered one of the fastest-growing, interdisciplinary high technologies during the post-Moore era. Modern advancements within this arena include wearable electronics, Internet of Things, and artificial brain-inspired intelligence, among other modalities, thus bringing opportunities to drive MEMS-based gas sensors with higher performance, lower costs, and wider applicability. However, the high demand for miniature and micropower sensors with unified processes on a single chip imposes great challenges. This review focuses on recent developments and pitfalls in MEMS-based micro- and nanoscale gas sensors and details future trends. We also cover the background of the topic, seminal efforts, current applications and challenges, and opportunities for next-generation systems.
基于微机电系统（MEMS）的半导体气体传感器被认为是后摩尔时代发展最快的跨学科高新技术之一。该领域的现代进展包括可穿戴电子设备、物联网和人工大脑启发的智能等，从而为具有更高性能、更低成本和更广泛适用性的基于 MEMS 的气体传感器带来了机遇。然而，对具有统一工艺的微型和微功率传感器的高需求给单一芯片带来了巨大的挑战。本综述重点介绍了基于 MEMS 的微纳尺度气体传感器的最新发展和缺陷，并详细阐述了未来的发展趋势。我们还涵盖了该主题的背景、开创性工作、当前应用和挑战，以及下一代系统的机遇。
