Kuwahara Makoto, Agemura Toshihide
Institute of Materials and Systems for Sustainability, Nagoya University, Nagoya 464-8603, Japan.
Department of Engineering, Nagoya University, Nagoya 464-8603, Japan.
Microscopy (Oxf). 2023 Apr 6;72(2):97-110. doi: 10.1093/jmicro/dfac069.
Temporal resolution in transmission electron microscopy (TEM) has progressed to the sub-picosecond level with the stroboscopic method using a photoemission mechanism with an ultrafast laser for the electron gun. Time-resolved TEM in conjunction with a photocathode (PC)-type electron source pumped by a pulsed laser has been actively developed to exceed sub-nanosecond time resolution. Here, we provide an overview of the trends in this field and discuss the measurement targets that can be obtained by time-resolved measurements. Furthermore, we consider the types and characteristics of PC materials and their related physical quantities for evaluation of electron beam properties. Experimental results obtained by time-resolved TEM using a semiconductor PC that has a surface with a negative electron affinity are presented, and application results based on quantum mechanics are given. We also describe new techniques for improving the time resolution and new applications of pulsed electron beams in electron microscopy and discuss the measurement targets that are expected for time-resolved electron microscopy.
利用超快激光的光发射机制作为电子枪的频闪法,使透射电子显微镜(TEM)的时间分辨率提升至亚皮秒级别。与由脉冲激光泵浦的光阴极(PC)型电子源相结合的时间分辨TEM已得到积极发展,以超越亚纳秒时间分辨率。在此,我们概述该领域的发展趋势,并讨论通过时间分辨测量可获得的测量目标。此外,我们考虑用于评估电子束特性的PC材料的类型和特性及其相关物理量。展示了使用具有负电子亲和性表面的半导体PC通过时间分辨TEM获得的实验结果,并给出了基于量子力学的应用结果。我们还描述了提高时间分辨率的新技术以及脉冲电子束在电子显微镜中的新应用,并讨论了时间分辨电子显微镜预期的测量目标。