Huang Chunming, Chen Yantao, Wang Xiao-Lin, Zhu Bao, Liu Wen-Jun, Ding Shi-Jin, Wu Xiaohan
School of Microelectronics, Fudan University, Shanghai200433, China.
Jiashan Fudan Institute, Jiaxing, Zhejiang Province314100, China.
ACS Appl Mater Interfaces. 2023 Feb 8;15(5):7129-7136. doi: 10.1021/acsami.2c20752. Epub 2023 Jan 29.
Miniaturized spectrometers have attracted much attention due to their capability to detect spectral information within a small size. However, such technology still faces challenges including large-scale preparation and performance repeatability. In this work, we overcome these challenges by demonstrating a microspectrometer constructed with a series of pixelized graded-bandgap perovskite photodetectors fabricated with inkjet printing. High-quality perovskite films with minimal pinholes and large grains are deposited by optimizing printing conditions including substrate temperature and surface modification. The resulting perovskite photodetectors show decent photosensing performance, and the different photodetectors based on perovskite films with different bandgaps exhibit various spectral responsivities with different cutoff wavelength edges. Microspectrometers are then constructed with the array of the pixelized graded-bandgap perovskite photodetectors, and incident spectra are algorithmically reconstructed by combining their output currents. The reconstruction performance of the miniaturized spectrometer is evaluated by comparing the results to the spectral curve measured with a commercial bulky spectrometer, indicating a reliable spectral reconstruction with a resolution of around 10 nm. More significantly, the miniaturized spectrometers are successfully fabricated on polymer substrates, and they demonstrate excellent mechanical flexibility. Therefore, this work provides a flexible miniaturized spectrometer with large-scale fabricability, which is promising for emerging applications including wearable devices, hyperspectral imaging, and internet of things.
微型光谱仪因其能够在小尺寸内检测光谱信息而备受关注。然而,这种技术仍面临包括大规模制备和性能重复性在内的挑战。在这项工作中,我们通过展示一种由一系列采用喷墨打印制造的像素化渐变带隙钙钛矿光电探测器构建的微型光谱仪,克服了这些挑战。通过优化包括衬底温度和表面改性在内的打印条件,沉积出具有最小针孔和大晶粒的高质量钙钛矿薄膜。所得的钙钛矿光电探测器表现出良好的光电传感性能,基于具有不同带隙的钙钛矿薄膜的不同光电探测器表现出具有不同截止波长边缘的各种光谱响应度。然后用像素化渐变带隙钙钛矿光电探测器阵列构建微型光谱仪,并通过组合它们的输出电流以算法方式重建入射光谱。通过将结果与用商用大型光谱仪测量的光谱曲线进行比较,评估了微型光谱仪的重建性能,表明其具有约10 nm分辨率的可靠光谱重建。更重要的是,微型光谱仪成功地在聚合物衬底上制造出来,并展示出优异的机械柔韧性。因此,这项工作提供了一种具有大规模可制造性的柔性微型光谱仪,有望应用于可穿戴设备、高光谱成像和物联网等新兴领域。