Peng Hu, Grob Leroy, Weiß Lennart Jakob Konstantin, Hiendlmeier Lukas, Music Emir, Kopic Inola, F Teshima Tetsuhiko, Rinklin Philipp, Wolfrum Bernhard
Neuroelectronics, Munich Institute of Biomedical Engineering, Department of Electrical Engineering, TUM School of Computation, Information and Technology, Technical University of Munich, Hans-Piloty-Str. 1, Garching, 85748, Germany.
Medical & Health Informatics Laboratories NTT Research Incorporated 940 Stewart Dr, Sunnyvale, CA 94085, USA.
Nanoscale. 2023 Feb 23;15(8):4006-4013. doi: 10.1039/d2nr05640b.
Chip-based impact electrochemistry can provide means to measure nanoparticles in solution by sensing their stochastic collisions on appropriately-polarized microelectrodes. However, a planar microelectrode array design still restricts the particle detection to the chip surface and does not allow detection in 3D environments. In this work, we report a fast fabrication process for 3D microelectrode arrays by combining ink-jet printing with laser-patterning. To this end, we printed 3D pillars from polyacrylate ink as a scaffold. Then, the metal structures are manufactured sputtering and laser-ablation. Finally, the chip is passivated with a parylene-C layer and the electrode tips are created laser-ablation in a vertical alignment. As a proof of principle, we employ our 3D micro-ring-electrode arrays for single impact recordings from silver nanoparticles.
