Jiao Chunxiao, Wang Chengkai, Wang Meng, Pan Jinghong, Gao Chao, Wang Qi
College of Sciences, Northeastern University, Shenyang 110819, China.
School of Materials Science and Engineering, Northeastern University, Shenyang 110819, China.
Nanomaterials (Basel). 2023 Jan 23;13(3):465. doi: 10.3390/nano13030465.
In recent years, with the rapid development of flexible electronic devices, researchers have a great interest in the research of electronic skin (e-skin). Traditional e-skin, which is made of rigid integrated circuit chips, not only limits the overall flexibility, but also consumes a lot of power and poses certain security risks to the human body. In this paper, a wireless passive e-skin is designed based on the surface acoustic wave sensor (SAWS) of lithium niobate piezoelectric film. The e-skin has the advantages of small size, high precision, low power consumption, and good flexibility. With the multi-sensing function of stress, temperature, and sweat ion concentration, etc., the newly designed e-skin is a sensor platform for a wide range of external stimuli, and the measurement results can be directly presented in frequency. In order to explore the characteristic parameters and various application scenarios of the SAWS, finite element analysis is carried out using the simulation software; the relationship between the SAWS and various influencing factors is explored, and the related performance curve is obtained. These simulation results provide important reference and experimental guidance for the design and preparation of SAW e-skin.
近年来,随着柔性电子器件的快速发展,研究人员对电子皮肤(e-skin)的研究产生了浓厚兴趣。传统的电子皮肤由刚性集成电路芯片制成,不仅限制了整体柔韧性,还消耗大量电力,并对人体构成一定的安全风险。本文基于铌酸锂压电薄膜的表面声波传感器(SAWS)设计了一种无线无源电子皮肤。该电子皮肤具有尺寸小、精度高、功耗低和柔韧性好等优点。新设计的电子皮肤具有应力、温度和汗液离子浓度等多传感功能,是一个用于广泛外部刺激的传感器平台,测量结果可以直接以频率呈现。为了探究SAWS的特性参数和各种应用场景,使用仿真软件进行了有限元分析;探索了SAWS与各种影响因素之间的关系,并获得了相关性能曲线。这些仿真结果为SAW电子皮肤的设计和制备提供了重要参考和实验指导。