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等温退火对AlTiSiN/TiSiN纳米复合涂层微观结构、形貌及氧化行为的影响

Influence of Isothermal Annealing on Microstructure, Morphology and Oxidation Behavior of AlTiSiN/TiSiN Nanocomposite Coatings.

作者信息

Šulhánek Patrik, Ďuriška Libor, Palcut Marián, Babincová Paulína, Sahul Martin, Čaplovič Ľubomír, Kusý Martin, Orovčík Ľubomír, Nagy Štefan, Satrapinskyy Leonid, Haršáni Marián, Černičková Ivona

机构信息

Faculty of Materials Science and Technology in Trnava, Slovak University of Technology in Bratislava, J. Bottu 25, 917 24 Trnava, Slovakia.

Institute of Materials and Machine Mechanics, Slovak Academy of Sciences, Dúbravská cesta 9, 845 13 Bratislava, Slovakia.

出版信息

Nanomaterials (Basel). 2023 Jan 24;13(3):474. doi: 10.3390/nano13030474.

DOI:10.3390/nano13030474
PMID:36770435
原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC9921304/
Abstract

The present work investigates the influence of isothermal annealing on the microstructure and oxidation behavior of nanocomposite coatings. AlTiSiN/TiSiN coatings with TiSiN adhesive layer were deposited onto a high-speed steel substrate via physical vapor deposition. The coatings were investigated in the as-deposited state as well as after annealing in air at 700, 800, 900 and 1000 °C, respectively. The microstructure and morphology of the coatings were observed using scanning electron microscopy and transmission electron microscopy. The chemical composition and presence of oxidation products were studied by energy-dispersive X-ray spectroscopy. The phase identification was performed by means of X-ray diffraction. In the microstructure of the as-deposited coating, the (TiAl)N particles were embedded in an amorphous SiN matrix. TiO and SiO were found at all annealing temperatures, and AlO was additionally identified at 1000 °C. It was found that, with increasing annealing temperature, the thickness of the oxide layer increased, and its morphology and chemical composition changed. At 700 and 800 °C, a Ti-Si-rich surface oxide layer was formed. At 900 and 1000 °C, an oxidized part of the coating was observed in addition to the surface oxide layer. Compared to the as-deposited sample, the oxidized samples exhibited considerably worse mechanical properties.

摘要

本工作研究了等温退火对纳米复合涂层微观结构和氧化行为的影响。通过物理气相沉积法在高速钢基体上沉积了带有TiSiN粘结层的AlTiSiN/TiSiN涂层。分别对涂层在沉积态以及在700、800、900和1000℃空气中退火后的状态进行了研究。使用扫描电子显微镜和透射电子显微镜观察涂层的微观结构和形貌。通过能量色散X射线光谱研究涂层的化学成分和氧化产物的存在情况。借助X射线衍射进行相鉴定。在沉积态涂层的微观结构中，(TiAl)N颗粒嵌入非晶SiN基体中。在所有退火温度下均发现了TiO和SiO，在1000℃时还额外鉴定出了AlO。结果发现，随着退火温度的升高，氧化层的厚度增加，其形貌和化学成分发生变化。在700和800℃时，形成了富含Ti-Si的表面氧化层。在900和1000℃时，除了表面氧化层外，还观察到涂层有一部分被氧化。与沉积态样品相比，氧化后的样品表现出明显更差的力学性能。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/bb34/9921304/2e9414c37ef1/nanomaterials-13-00474-g010.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/bb34/9921304/469959e6ef12/nanomaterials-13-00474-g001.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/bb34/9921304/15211a18467f/nanomaterials-13-00474-g002.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/bb34/9921304/afef45dcc09a/nanomaterials-13-00474-g003.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/bb34/9921304/36ecb43b6941/nanomaterials-13-00474-g004.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/bb34/9921304/a8ef0693ef5e/nanomaterials-13-00474-g005.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/bb34/9921304/9a4f44591dab/nanomaterials-13-00474-g006.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/bb34/9921304/0f6194fb807a/nanomaterials-13-00474-g007.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/bb34/9921304/d669be6dd2f8/nanomaterials-13-00474-g008.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/bb34/9921304/87e55135b9cf/nanomaterials-13-00474-g009.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/bb34/9921304/2e9414c37ef1/nanomaterials-13-00474-g010.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/bb34/9921304/469959e6ef12/nanomaterials-13-00474-g001.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/bb34/9921304/15211a18467f/nanomaterials-13-00474-g002.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/bb34/9921304/afef45dcc09a/nanomaterials-13-00474-g003.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/bb34/9921304/36ecb43b6941/nanomaterials-13-00474-g004.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/bb34/9921304/a8ef0693ef5e/nanomaterials-13-00474-g005.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/bb34/9921304/9a4f44591dab/nanomaterials-13-00474-g006.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/bb34/9921304/0f6194fb807a/nanomaterials-13-00474-g007.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/bb34/9921304/d669be6dd2f8/nanomaterials-13-00474-g008.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/bb34/9921304/87e55135b9cf/nanomaterials-13-00474-g009.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/bb34/9921304/2e9414c37ef1/nanomaterials-13-00474-g010.jpg

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本文引用的文献

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