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激光诱导周期性表面结构在宽带隙半导体和电介质中的应用:评估与未来展望

LIPSS Applied to Wide Bandgap Semiconductors and Dielectrics: Assessment and Future Perspectives.

作者信息

Mastellone Matteo, Pace Maria Lucia, Curcio Mariangela, Caggiano Nicola, De Bonis Angela, Teghil Roberto, Dolce Patrizia, Mollica Donato, Orlando Stefano, Santagata Antonio, Serpente Valerio, Bellucci Alessandro, Girolami Marco, Polini Riccardo, Trucchi Daniele Maria

机构信息

ISM-CNR, DiaTHEMA Laboratory, U.O.S. Montelibretti, Via Salaria km 29.300, 00015 Monterotondo, Italy.

ISM-CNR, FemtoLAB, U.O.S. Tito Scalo, Zona Industriale, 85050 Potenza, Italy.

出版信息

Materials (Basel). 2022 Feb 13;15(4):1378. doi: 10.3390/ma15041378.

Abstract

With the aim of presenting the processes governing the Laser-Induced Periodic Surface Structures (LIPSS), its main theoretical models have been reported. More emphasis is given to those suitable for clarifying the experimental structures observed on the surface of wide bandgap semiconductors (WBS) and dielectric materials. The role played by radiation surface electromagnetic waves as well as Surface Plasmon Polaritons in determining both Low and High Spatial Frequency LIPSS is briefly discussed, together with some experimental evidence. Non-conventional techniques for LIPSS formation are concisely introduced to point out the high technical possibility of enhancing the homogeneity of surface structures as well as tuning the electronic properties driven by point defects induced in WBS. Among these, double- or multiple-fs-pulse irradiations are shown to be suitable for providing further insight into the LIPSS process together with fine control on the formed surface structures. Modifications occurring by LIPSS on surfaces of WBS and dielectrics display high potentialities for their cross-cutting technological features and wide applications in which the main surface and electronic properties can be engineered. By these assessments, the employment of such nanostructured materials in innovative devices could be envisaged.

摘要

为了介绍激光诱导周期性表面结构(LIPSS)的形成过程,已报道了其主要理论模型。重点介绍了那些适用于阐明在宽带隙半导体(WBS)和介电材料表面观察到的实验结构的模型。简要讨论了辐射表面电磁波以及表面等离激元极化激元在确定低频和高频LIPSS方面所起的作用,并给出了一些实验证据。简要介绍了用于形成LIPSS的非常规技术,以指出提高表面结构均匀性以及调节由WBS中诱导的点缺陷驱动的电子特性的高技术可能性。其中,双或多飞秒脉冲辐照被证明适用于进一步深入了解LIPSS过程以及对形成的表面结构进行精细控制。LIPSS在WBS和电介质表面上产生的改性因其交叉技术特性和在可设计主要表面和电子特性的广泛应用中显示出高潜力。通过这些评估,可以设想在创新设备中使用此类纳米结构材料。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/5265/8880014/3de8cfd7eb47/materials-15-01378-g001.jpg

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