Nano Lett. 2023 Mar 8;23(5):2016-2022. doi: 10.1021/acs.nanolett.3c00233. Epub 2023 Feb 27.
We image and characterize the mechanical modes of a 2D drum resonator made of hBN suspended over a high-stress SiN membrane. Our measurements demonstrate hybridization between various modes of the hBN resonator and those of the SiN membrane. The measured resonance frequencies and spatial profiles of the modes are consistent with finite-element simulations based on idealized geometry. Spectra of the thermal motion reveal that, depending on the degree of hybridization with modes of the heavier and higher-quality-factor SiN membrane, the quality factors and the motional mass of the hBN drum modes can be shifted by orders of magnitude. This effect could be exploited to engineer hybrid drum/membrane modes that combine the low motional mass of 2D materials with the high quality factor of SiN membranes for optomechanical or sensing applications.
我们对由悬空于高应力氮化硅膜上的六方氮化硼制成的 2D 鼓式谐振器的机械模式进行了成像和特征描述。我们的测量结果表明，六方氮化硼谐振器的各种模式与氮化硅膜的模式之间存在杂化。测量得到的模式的共振频率和空间分布与基于理想化几何形状的有限元模拟结果一致。热运动的光谱表明，根据与较重和高质量因数的氮化硅膜的模式的杂化程度，六方氮化硼鼓式模式的品质因数和运动质量可以移动数量级。这种效应可以用来设计混合鼓/膜模式，将二维材料的低运动质量与氮化硅膜的高质量因数结合起来，用于光机械或传感应用。
