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半球形圆顶取向对离子束辅助沉积制备类金刚石碳膜结构的影响

The Effects of Hemisphere Dome Orientation on the Structure of Diamond-like Carbon Film Prepared Using Ion Beam Assisted Deposition.

作者信息

Shang Peng, Ma Yuanfei, Zhang Zhenyun, Sun Peng, Liu Huasong, Shi Hongchun, Lin Quan, Xue Tao, Ji Yiqin

机构信息

GRINM Guojing Advanced Materials Co., Ltd., General Research Institute for Nonferrous Metals, Beijing 100088, China.

Tianjin Key Laboratory of Optical Thin Film, Tianjin Jinhang Technical Physics Institute, Tianjin 300308, China.

出版信息

Materials (Basel). 2023 Feb 21;16(5):1773. doi: 10.3390/ma16051773.

DOI:10.3390/ma16051773
PMID:36902887
原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC10004551/
Abstract

Diamond-like carbon (DLC) has attracted significant attention in the recent decades because of its unique properties and applications. Ion beam assisted deposition (IBAD) has been widely established in industry due to the advantages of easy handling and scalability. In this work, a hemisphere dome model is specially designed as a substrate. The influence of the surface orientation on the coating thickness, Raman I/I ratio, surface roughness and the stress of the DLC films are examined. The reduction in the stress in the DLC films reflects the lower energy-dependence in diamond due to the varied sp3/sp2 fraction and columnar growth pattern. The variation of the surface orientation provides an efficient means of tailoring the properties and microstructure of the DLC films.

摘要

近几十年来，类金刚石碳（DLC）因其独特的性能和应用而备受关注。离子束辅助沉积（IBAD）由于易于操作和可扩展性等优点，已在工业中广泛应用。在这项工作中，专门设计了一个半球形穹顶模型作为衬底。研究了表面取向对DLC薄膜的涂层厚度、拉曼I/I比、表面粗糙度和应力的影响。DLC薄膜中应力的降低反映了由于sp3/sp2比例和柱状生长模式的变化，金刚石中能量依赖性较低。表面取向的变化为调整DLC薄膜的性能和微观结构提供了一种有效的方法。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/deb0/10004551/ca916dac45e7/materials-16-01773-g008.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/deb0/10004551/bc71dccfb797/materials-16-01773-g001.jpg
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https://cdn.ncbi.nlm.nih.gov/pmc/blobs/deb0/10004551/81ffcea7c7f0/materials-16-01773-g003.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/deb0/10004551/9cbb9565b288/materials-16-01773-g004.jpg
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https://cdn.ncbi.nlm.nih.gov/pmc/blobs/deb0/10004551/30ac81740307/materials-16-01773-g007.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/deb0/10004551/ca916dac45e7/materials-16-01773-g008.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/deb0/10004551/bc71dccfb797/materials-16-01773-g001.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/deb0/10004551/93cf5f855c48/materials-16-01773-g002.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/deb0/10004551/81ffcea7c7f0/materials-16-01773-g003.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/deb0/10004551/9cbb9565b288/materials-16-01773-g004.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/deb0/10004551/3aeefc86cb94/materials-16-01773-g005.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/deb0/10004551/c2c5dcb48880/materials-16-01773-g006.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/deb0/10004551/30ac81740307/materials-16-01773-g007.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/deb0/10004551/ca916dac45e7/materials-16-01773-g008.jpg

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