Centro Ricerche Elettro Ottiche, 67100 L'Aquila, Italy.
Institute for Microelectronics and Microsystems, Italian National Research Council CNR-IMM, 40129 Bologna, Italy.
Sensors (Basel). 2023 Mar 3;23(5):2809. doi: 10.3390/s23052809.
This paper reports on a compact and lightweight sensor for analysis of gases/vapors by means of a MEMS-based pre-concentrator coupled to a miniaturized infrared absorption spectroscopy (IRAS) module. The pre-concentrator was utilized to sample and trap vapors in a MEMS cartridge filled with sorbent material and to release them once concentrated by fast thermal desorption. It was also equipped with a photoionization detector for in-line detection and monitoring of the sampled concentration. The vapors released by the MEMS pre-concentrator are injected into a hollow fiber, which acts as the analysis cell of the IRAS module. The miniaturized internal volume of the hollow fiber of about 20 microliters keeps the vapors concentrated for analysis, thus allowing measurement of their infrared absorption spectrum with a signal to noise ratio high enough to identify the molecule, despite the short optical path, starting from sampled concentration in air down to parts per million. Results obtained for ammonia, sulfur hexafluoride, ethanol and isopropanol are reported to illustrate the sensor detection and identification capability. A limit of identification (LoI) of about 10 parts per million was validated in the lab for ammonia. The lightweight and low power consumption design of the sensor allowed operation onboard unmanned aerial vehicles (UAVs). The first prototype was developed within the EU Horizon 2020 project ROCSAFE for the remote assessment and forensic examination of a scene in the aftermath of industrial or terroristic accidents.
本文报告了一种紧凑、轻巧的传感器,用于通过基于微机电系统 (MEMS) 的预浓缩器与微型化红外吸收光谱 (IRAS) 模块相结合来分析气体/蒸气。预浓缩器用于通过快速热解吸在充满吸附材料的 MEMS 盒中采样和捕获蒸气,并在浓缩后释放它们。它还配备了光电离检测器,用于在线检测和监测采样浓度。由 MEMS 预浓缩器释放的蒸气被注入中空纤维,中空纤维作为 IRAS 模块的分析单元。中空纤维的微型化内部体积约为 20 微升,可使蒸气保持浓缩状态以供分析,从而允许测量其红外吸收光谱,其信噪比足以识别分子,尽管光路较短,但从空气中的采样浓度开始,可检测到百万分之一的浓度。报告了用于说明传感器检测和识别能力的氨、六氟化硫、乙醇和异丙醇的结果。在实验室中,氨的鉴定极限 (LoI) 约为 10 ppm。传感器的重量轻、功耗低,允许在无人驾驶飞行器 (UAV) 上运行。第一个原型是在欧盟地平线 2020 项目 ROCSAFE 中开发的,用于在工业或恐怖事故发生后对场景进行远程评估和法医检查。