Department of Mechanical Engineering, College of Science and Engineering, Ritsumeikan University, Kusatsu, 525-8577, Japan.
Graduate Course of Science and Engineering, Ritsumeikan University, Kusatsu, 525-8577, Japan.
Sci Rep. 2023 Mar 16;13(1):4369. doi: 10.1038/s41598-023-31026-8.
The spatial resolution of typical sensor probes is sufficient for measuring the average electric properties of microelectrical devices, but they are unable to measure the distribution with a spatial precision. Liquid crystal droplets (LCDs) are promising candidate for visualizing the distribution. When voltage is applied, the LCDs show rotational and translational behaviors which depend on the location of LCDs within the devices. We demonstrate that by comparing the experimental and numerical results, the electric field and electrostatic energy distribution are visualized by rotating and transporting LCDs, with a spatial resolution of 10 µm and a detection accuracy of 5 µV/µm. In addition, we produced an array of LCDs by designing periodic modulation of the electrostatic energy density in the model device. These findings show that the LCDs serve as a periodic modulator of the refractive index as well as a sensor for the observation of electric properties of microelectrical devices.
典型传感器探头的空间分辨率足以测量微电子设备的平均电特性，但无法以空间精度测量分布。液晶液滴（LCD）是用于可视化分布的有前途的候选物。当施加电压时，LCD 会表现出旋转和平移行为，这取决于 LCD 在设备内的位置。我们通过比较实验和数值结果证明，通过旋转和输送 LCD，可以以 10 µm 的空间分辨率和 5 µV/µm 的检测精度来可视化电场和静电能分布。此外，我们通过设计模型设备中静电能密度的周期性调制来制作液晶液滴阵列。这些发现表明，LCD 不仅可以作为折射率的周期性调制器，还可以作为观察微电子设备电特性的传感器。
