Korea Additive Manufacturing Innovation Centre (KAMIC), Korea Institute of Industrial Technology (KITECH), Siheung-si, Republic of Korea.
Sci Rep. 2023 Mar 23;13(1):4781. doi: 10.1038/s41598-023-32030-8.
Two-photon stereolithography (TPS) is widely used for the fabrication of various three-dimensional (3D) structures with sub-micron fabrication resolution in a single fabrication process. However, TPS is unsuitable for microstructures with fine-hole patterns. The laser ablation process can be easily drilled, or made holes in various materials. However, in the case of laser ablation, the focal plane of the laser is fixed, which is limited to the processing plane. In this study, a multidirectional ablation process is studied to apply laser ablation to various processing planes of a 3D microstructure fabricated by the TPS process. A 3D hybrid fabrication process with the advantages of both TPS and laser ablation is expected to improve the fabrication efficiency. The 3D hybrid process is proposed based on a single laser source. The microstructure is fabricated using TPS, and the multi-directional ablation process creates a hole in the lateral side of the 3D microstructure. To develop the multidirectional ablation process, the reflecting mirror system should be designed to adaptably rotate the laser focal plane and guide the laser path for the target process plane. Through various examples, we demonstrate the ability of the multi-directional ablation process with various examples.
双光子立体光刻（TPS）技术广泛用于制造各种具有亚微米制造分辨率的三维（3D）结构，可在单个制造过程中完成。然而，TPS 技术不适合具有精细孔图案的微结构。激光烧蚀工艺可以很容易地在各种材料上钻孔或打孔。然而，在激光烧蚀的情况下，激光的焦平面是固定的，这仅限于加工平面。在这项研究中，研究了一种多方向烧蚀工艺，以将激光烧蚀应用于 TPS 工艺制造的各种 3D 微结构的加工平面。具有 TPS 和激光烧蚀优点的 3D 混合制造工艺有望提高制造效率。该 3D 混合工艺基于单个激光源提出。使用 TPS 制造微结构，然后通过多方向烧蚀工艺在 3D 微结构的横向侧面上创建一个孔。为了开发多方向烧蚀工艺，应该设计反射镜系统以自适应地旋转激光焦点平面并引导激光路径到目标加工平面。通过各种示例，我们展示了该多方向烧蚀工艺的能力。
