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基于机械剥离范德华材料的场效应晶体管气体传感器

Field Effect Transistor Gas Sensors Based on Mechanically Exfoliated Van der Waals Materials.

作者信息

Zhao Yue, Wu Gang, Hung Kuan-Ming, Cho Jiung, Choi Miri, Ó Coileáin Cormac, Duesberg Georg S, Ren Xiang-Kui, Chang Ching-Ray, Wu Han-Chun

机构信息

School of Physics, Beijing Institute of Technology, Beijing 100081, P. R. China.

Department of Electronics Engineering, National Kaohsiung University of Science and Technology, Kaohsiung, Taiwan 807, ROC.

出版信息

ACS Appl Mater Interfaces. 2023 Apr 5;15(13):17335-17343. doi: 10.1021/acsami.2c23086. Epub 2023 Mar 27.

Abstract

The high surface-to-volume ratio and flatness of mechanically exfoliated van der Waals (vdW) layered materials make them an ideal platform to investigate the Langmuir absorption model. In this work, we fabricated field effect transistor gas sensors, based on a variety of mechanically exfoliated vdW materials, and investigated their electrical field-dependent gas sensing properties. The good agreement between the experimentally extracted intrinsic parameters, such as equilibrium constant and adsorption energy, and theoretically predicted values suggests validity of the Langmuir absorption model for vdW materials. Moreover, we show that the device sensing behavior depends crucially on the availability of carriers, and giant sensitivities and strong selectivity can be achieved at the sensitivity singularity. Finally, we demonstrate that such features provide a fingerprint for different gases to quickly detect and differentiate between low concentrations of mixed hazardous gases using sensor arrays.

摘要

机械剥离的范德华(vdW)层状材料的高表面体积比和平整度使其成为研究朗缪尔吸附模型的理想平台。在这项工作中,我们基于多种机械剥离的vdW材料制造了场效应晶体管气体传感器,并研究了它们的电场依赖型气敏特性。实验提取的本征参数(如平衡常数和吸附能)与理论预测值之间的良好一致性表明朗缪尔吸附模型对vdW材料的有效性。此外,我们表明器件的传感行为关键取决于载流子的可用性,并且在灵敏度奇异性处可以实现巨大的灵敏度和强选择性。最后,我们证明这些特性为不同气体提供了一个指纹,以便使用传感器阵列快速检测和区分低浓度的混合有害气体。

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