Le Xuan-Luc, Le Xuan-Bach, Hwangbo Yuhwan, Joo Jiho, Choi Gwang-Mun, Eom Yong-Sung, Choi Kwang-Seong, Choa Sung-Hoon
Graduate School of Nano IT Design Fusion, Seoul National University of Science and Technology, Seoul 01811, Republic of Korea.
Faculty of Mechanical Engineering, Thuyloi University, 175 Tay Son, Dong Da, Hanoi 100000, Vietnam.
Micromachines (Basel). 2023 Mar 4;14(3):601. doi: 10.3390/mi14030601.
The aim of this study was to develop a flexible package technology using laser-assisted bonding (LAB) technology and an anisotropic solder paste (ASP) material ultimately to reduce the bonding temperature and enhance the flexibility and reliability of flexible devices. The heat transfer phenomena during the LAB process, mechanical deformation, and the flexibility of a flexible package were analyzed by experimental and numerical simulation methods. The flexible package was fabricated with a silicon chip and a polyimide (PI) substrate. When the laser beam was irradiated onto the flexible package, the temperatures of the solder increased very rapidly to 220 °C, high enough to melt the ASP solder, within 2.4 s. After the completion of irradiation, the temperature of the flexible package decreased quickly. It was found that the solder powder in ASP was completely melted and formed stable interconnections between the silicon chip and the copper pads, without thermal damage to the PI substrate. After the LAB process, the flexible package showed warpage of 80 μm, which was very small compared to the size of the flexible package. The stress of each component in the flexible package generated during the LAB process was also found to be very low. The flexible device was bent up to 7 mm without failure, and the flexibility can be improved further by reducing the thickness of the silicon chip. The bonding strength and environmental reliability tests also showed the excellent mechanical endurance of the flexible package.
本研究的目的是开发一种灵活的封装技术,该技术使用激光辅助键合(LAB)技术和各向异性焊膏(ASP)材料,最终降低键合温度,提高柔性器件的柔韧性和可靠性。通过实验和数值模拟方法分析了LAB过程中的传热现象、机械变形以及柔性封装的柔韧性。柔性封装由硅芯片和聚酰亚胺(PI)基板制成。当激光束照射到柔性封装上时,焊料温度在2.4秒内迅速升至220°C,足以熔化ASP焊料。照射完成后,柔性封装的温度迅速下降。结果发现,ASP中的焊料粉末完全熔化,并在硅芯片和铜焊盘之间形成了稳定的互连,而PI基板没有受到热损伤。LAB过程后,柔性封装的翘曲为80μm,与柔性封装的尺寸相比非常小。还发现LAB过程中柔性封装内各组件产生的应力非常低。柔性器件弯曲至7mm无故障,通过减小硅芯片的厚度可进一步提高柔韧性。键合强度和环境可靠性测试也表明柔性封装具有出色的机械耐久性。