Cordill Megan J, Kreiml Patrice, Mitterer Christian
Erich Schmid Institute for Materials Science, Austrian Academy of Sciences, 8700 Leoben, Austria.
Department of Materials Science, Montanuniversität Leoben, 8700 Leoben, Austria.
Materials (Basel). 2022 Jan 25;15(3):926. doi: 10.3390/ma15030926.
More and more flexible, bendable, and stretchable sensors and displays are becoming a reality. While complex engineering and fabrication methods exist to manufacture flexible thin film systems, materials engineering through advanced metallic thin film deposition methods can also be utilized to create robust and long-lasting flexible devices. In this review, materials engineering concepts as well as electro-mechanical testing aspects will be discussed for metallic films. Through the use of residual stress, film thickness, or microstructure tailoring, all controlled by the film deposition parameters, long-lasting flexible film systems in terms of increased fracture or deformation strains, electrical or mechanical reliability, can be generated. These topics, as well as concrete examples, will be discussed. One objective of this work is to provide a toolbox with sustainable and scalable methods to create robust metal thin films for flexible, bendable, and stretchable applications.
越来越多灵活、可弯曲和可拉伸的传感器及显示器正在成为现实。虽然存在用于制造柔性薄膜系统的复杂工程和制造方法，但通过先进的金属薄膜沉积方法进行材料工程也可用于制造坚固耐用的柔性器件。在本综述中，将讨论金属薄膜的材料工程概念以及机电测试方面。通过利用由薄膜沉积参数控制的残余应力、薄膜厚度或微观结构剪裁，可以生成在增加断裂或变形应变、电气或机械可靠性方面持久耐用的柔性薄膜系统。将讨论这些主题以及具体示例。这项工作的一个目标是提供一个工具箱，其中包含可持续且可扩展的方法，以制造用于柔性、可弯曲和可拉伸应用的坚固金属薄膜。
