Shanghai University of Engineering Science, Shanghai 201620, China.
Rev Sci Instrum. 2023 Mar 1;94(3):035003. doi: 10.1063/5.0128882.
A novel thin single-phase drive linear ultrasonic motor is proposed and tested in this paper. The proposed motor exhibits bidirectional driving via switching between the right-driving vibration mode (RD mode) and the left-driving vibration mode (LD mode). The structure and working principle of the motor are analyzed. Next, the finite element model of the motor is established and the dynamic performance is analyzed. A prototype motor is then fabricated, and its vibration characteristics are established via impedance testing. Finally, an experimental platform is built and the mechanical characteristics of the motor are experimentally investigated. The maximum no-load speed of the motor is ∼159.7 mm/s. With 8 N preload and 200 V voltage, the maximum thrust force of the motor in the RD and LD modes are ∼2.5 and 2.1 N, respectively. The motor possesses the advantages of being light in weight and thin structure and exhibiting an excellent performance. This work presents a new concept for the construction of ultrasonic actuators with bidirectional driving capacity.
本文提出并测试了一种新颖的单相薄型直线超声马达。所提出的马达通过在右驱振动模式 (RD 模式) 和左驱振动模式 (LD 模式) 之间切换实现双向驱动。分析了马达的结构和工作原理。接着，建立了马达的有限元模型并分析了其动态性能。然后制造了一个原型马达，并通过阻抗测试确定了其振动特性。最后，构建了一个实验平台，并对马达的机械特性进行了实验研究。马达的空载最大速度约为 159.7mm/s。在 8N 预紧力和 200V 电压下，马达在 RD 和 LD 模式下的最大推力分别约为 2.5N 和 2.1N。该马达具有重量轻、结构薄的优点，且性能优异。这项工作为具有双向驱动能力的超声致动器的构建提供了一个新概念。
