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面内取向对选择区域生长同质外延纳米线的影响。

Effect of in-plane alignment on selective area grown homo-epitaxial nanowires.

机构信息

Center for Quantum Devices, Niels Bohr Institute, University of Copenhagen, 2100 Copenhagen, Denmark.

Department of Energy Conversion and Storage, Technical University of Denmark, 2800 Kgs. Lyngby, Denmark.

出版信息

Nanotechnology. 2023 Apr 21;34(27). doi: 10.1088/1361-6528/acca27.

DOI:10.1088/1361-6528/acca27
PMID:37015220
Abstract

In-plane selective area growth (SAG) of III-V nanowires (NWs) has emerged as a scalable materials platform for quantum electronics and photonics applications. Most applications impose strict requirements on the material characteristics which makes optimization of the crystal quality vital. Alignment of in-plane SAG NWs with respect to the substrate symmetry is of importance due to the large substrate-NW interface as well as to obtain nanostructures with well-defined facets. Understanding the role of mis-orientation is thus important for designing devices and interpretation of electrical performance of devices. Here we study the effect of mis-orientation on morphology of selectively grown NWs oriented along the [1 1̅ 1̅] direction on GaAs(2 1 1)B. Atomic force microscopy is performed to extract facet roughness as a measure of structural quality. Further, we evaluate the dependence of material incorporation in NWs on the orientation and present the facet evolution in between two high symmetry in-plane orientations. By investigating the length dependence of NW morphology, we find that the morphology of ≈1m long nominally aligned NWs remains unaffected by the unintentional misalignment associated with the processing and alignment of the sample under study. Finally, we show that using Sb as a surfactant during growth improves root-mean-square facet roughness for large misalignment but does not lower it for nominally aligned NWs.

摘要

平面内选择区域生长(SAG)的 III-V 纳米线(NWs)已成为用于量子电子学和光子学应用的可扩展材料平台。大多数应用对材料特性提出了严格的要求,因此优化晶体质量至关重要。由于大的衬底-NW 界面以及获得具有明确定义晶面的纳米结构,因此与衬底对称性对齐的平面内 SAG NW 的对准很重要。因此,了解取向偏差的作用对于设计器件和解释器件的电性能很重要。在这里,我们研究了在 GaAs(2 1 1)B 上沿[1 1̅ 1̅]方向取向的选择性生长 NW 的取向偏差对形貌的影响。进行原子力显微镜以提取作为结构质量的度量的晶面粗糙度。此外,我们评估了材料在 NW 中掺入的取向依赖性,并提出了在两个高对称平面内取向之间的晶面演化。通过研究 NW 形貌的长度依赖性,我们发现,在研究样品的处理和对准过程中与非故意失配相关联的情况下,约 1m 长的名义对准 NW 的形貌不受影响。最后,我们表明,在生长过程中使用 Sb 作为表面活性剂可以改善大失配时的均方根晶面粗糙度,但对名义对准 NW 则不会降低。

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