Integrated Devices and Systems, University of Twente, 7500 AE Enschede, The Netherlands.
Bronkhorst High-Tech BV, 7261 AK Ruurlo, The Netherlands.
Sensors (Basel). 2023 Apr 18;23(8):4062. doi: 10.3390/s23084062.
This paper presents the modeling, fabrication, and testing of a 3D-printed Coriolis mass flow sensor. The sensor contains a free-standing tube with a circular cross-section printed using the LCD 3D-printing technique. The tube has a total length of 42 mm, an inner diameter of about 900 µm, and a wall thickness of approximately 230 µm. The outer surface of the tube is metalized using a Cu plating process, resulting in a low electrical resistance of 0.5 Ω. The tube is brought into vibration using an AC current in combination with a magnetic field from a permanent magnet. The displacement of the tube is detected using a laser Doppler vibrometer (LDV) that is part of a Polytec MSA-600 microsystem analyzer. The Coriolis mass flow sensor has been tested over a flow range of 0-150 g/h for water, 0-38 g/h for isopropyl alcohol (IPA), and 0-50 g/h for nitrogen. The maximum flow rates of water and IPA resulted in less than a 30 mbar pressure drop. The pressure drop at the maximum flow rate of nitrogen is 250 mbar.
本文介绍了一种 3D 打印科里奥利质量流量传感器的建模、制造和测试。该传感器包含一个自由站立的管，其横截面为圆形，采用 LCD 3D 打印技术打印而成。管的总长度为 42mm，内径约为 900µm，壁厚约为 230µm。管的外表面采用镀铜工艺进行金属化处理，电阻低至 0.5Ω。管通过交流电流与永磁体产生的磁场振动。管的位移使用 Polytec MSA-600 微系统分析仪的一部分激光多普勒测振仪 (LDV) 进行检测。该科里奥利质量流量传感器已在水的流量范围为 0-150g/h、异丙醇 (IPA) 的流量范围为 0-38g/h 和氮气的流量范围为 0-50g/h 进行了测试。水和 IPA 的最大流速导致的压降小于 30mbar。氮气的最大流速的压降为 250mbar。
