Opt Express. 2023 Apr 10;31(8):12912-12921. doi: 10.1364/OE.487096.
We consider the impact of intra-wafer systematic spatial variation, pattern density mismatch, and line edge roughness on splitter-tree-based integrated optical phased arrays. These variations can substantially affect the emitted beam profile in the array dimension. We study the effect on different architecture parameters, and the analysis is shown to be consistent with experimental results.
我们研究了晶圆内系统空间变化、图形密度不匹配和线边缘粗糙度对基于分束器树的集成光相控阵的影响。这些变化会显著影响阵列方向上的发射光束轮廓。我们研究了不同结构参数的影响，分析结果与实验结果一致。
