Opt Express. 2023 Apr 10;31(8):13374-13383. doi: 10.1364/OE.485078.
In order to reduce the cost of the piezo actuator array deformable mirror (DM), a piezoelectric DM driven by unimorph actuator arrays on multi-spatial layers is proposed. The actuator density can be multiplied by increasing the spatial layers of the actuator arrays. A low-cost DM prototype with 19 unimorph actuators located on three spatial layers is developed. The unimorph actuator can generate a wavefront deformation up to 11 µm at an operating voltage of 50 V. The DM can reconstruct typical low-order Zernike polynomial shapes accurately. The mirror can be flattened to 0.058 µm in RMS. Furthermore, a focal spot close to Airy spot is obtained in the far field after the aberrations of the adaptive optics testing system being corrected.
为降低压电致动器阵列变形镜（DM）的成本，提出了一种在多层空间结构上采用单边致动器阵列驱动的压电 DM。通过增加致动器阵列的空间层数，可以成倍增加致动器密度。开发了一个具有 19 个单边致动器的低成本 DM 原型，其位于三个空间层上。单边致动器在 50V 的工作电压下可以产生高达 11μm 的波前变形。DM 可以准确地重建典型的低阶泽尼克多项式形状。该镜面在经过自适应光学测试系统的像差校正后，在远场中可以得到接近艾里斑的光斑。
