Ma Jianqiang, Liu Ying, He Ting, Li Baoqing, Chu Jiaru
Department of Precision Machinery and Precision Instrumentation, University of Science and Technology of China, Hefei, China.
Appl Opt. 2011 Oct 10;50(29):5647-54. doi: 10.1364/AO.50.005647.
This paper reports the development and characterization of a low-cost thin unimorph deformable mirror (DM) driven by positive voltage. The developed DM consists of both an inner actuator array and an outer ring actuator, which works two drive modes: the inner actuator array is used for aberration correction, while the outer ring actuator is used to generate an overall defocus bias. An analytical model based on the theory of plates and shells is studied for predicting the behavior of the developed DM. Measurement results indicate that dual direction maximum defocus deformations of the developed DM are -14.3 and 14.9 μm, respectively, and the resonant frequency is 1.8 kHz. The root-mean-square deformation of the mirror surface after correction is better than λ/20 for λ=633 nm. The replication of Zernike mode shapes up to the fifth order demonstrates that this developed DM is satisfactory for low-order aberration correction.
本文报道了一种由正电压驱动的低成本薄型单压电晶片变形镜（DM）的研制与特性。所研制的DM由内部致动器阵列和外部环形致动器组成，其工作于两种驱动模式：内部致动器阵列用于像差校正，而外部环形致动器用于产生整体离焦偏置。研究了基于板壳理论的解析模型以预测所研制DM的行为。测量结果表明，所研制DM的双向最大离焦变形分别为-14.3和14.9μm，谐振频率为1.8kHz。对于λ=633nm，校正后镜面的均方根变形优于λ/20。高达五阶的泽尼克模式形状的复制表明，所研制的DM对于低阶像差校正令人满意。
