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用于多位非易失性薄膜存储晶体管的溶液处理乙酰丙酮锆电荷俘获层

Solution-processed zirconium acetylacetonate charge-trap layer for multi-bit nonvolatile thin-film memory transistors.

作者信息

Lee Song, Lee Jeong-In, Kim Chang-Hyun, Kwon Jin-Hyuk, Lee Jonghee, Boampong Amos Amoako, Kim Min-Hoi

机构信息

Department of Creative Convergence Engineering, Hanbat National University, Daejeon, South Korea.

School of Electronic Engineering, Gachon University, Seongnam, South Korea.

出版信息

Sci Technol Adv Mater. 2023 May 23;24(1):2212112. doi: 10.1080/14686996.2023.2212112. eCollection 2023.

DOI:10.1080/14686996.2023.2212112
PMID:37234069
原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC10208136/
Abstract

The charge trap property of solution-processed zirconium acetylacetonate (ZAA) for solution-processed nonvolatile charge-trap memory (CTM) transistors is demonstrated. Increasing the annealing temperature of the ZAA from room temperature (RT) to 300°C in ambient, the carbon double bonds within the ZAA decreases. The RT-dried ZAA for the -type organic-based CTM shows the widest threshold voltage shift (∆V ≈ 80 V), four distinct for a multi-bit memory operation and retained memory currents for 10 s with high memory on- and off-current ratio (I/I ≈ 5Ⅹ10). The -type oxide-based CTM (Ox-CTM) also shows a ∆ of 14 V and retained memory currents for 10 s with / ≈ 10. The inability of the Ox-CTM to be electrically erasable is well explained with simulated electrical potential contour maps. It is deduced that, irrespective of the varied solution-processed semiconductor used, the RT-dried organic ZAA as CTL shows the best memory functionality in the fabricated CTMs. This implies that the high carbon double bonds in the low-temperature processed ZAA CTL are very useful for low-cost multi-bit CTMs in flexible electronics.

摘要

溶液处理的乙酰丙酮锆(ZAA)用于溶液处理的非易失性电荷俘获存储器(CTM)晶体管的电荷俘获特性得到了证明。在环境气氛中将ZAA的退火温度从室温(RT)提高到300°C,ZAA中的碳双键会减少。用于n型有机基CTM的室温干燥ZAA显示出最宽的阈值电压偏移(∆V≈80 V),具有四个不同的电平用于多位存储操作,并且存储电流可保持10 s,具有高的存储开/关电流比(Ion/Ioff≈5×10)。p型氧化物基CTM(Ox-CTM)也显示出14 V的∆V,并且存储电流可保持10 s,Ion/Ioff≈10。通过模拟电势等高线图很好地解释了Ox-CTM无法进行电擦除的原因。据推断,无论使用何种不同的溶液处理半导体,室温干燥的有机ZAA作为电荷俘获层(CTL)在制造的CTM中都显示出最佳的存储功能。这意味着在低温处理的ZAA CTL中的高碳双键对于柔性电子器件中的低成本多位CTM非常有用。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/48ee/10208136/9d9857f2d1d8/TSTA_A_2212112_F0007_OC.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/48ee/10208136/08b3c03a44d8/TSTA_A_2212112_UF0001_OC.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/48ee/10208136/fd50d12f6b0d/TSTA_A_2212112_F0001_OC.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/48ee/10208136/67bd531da2c4/TSTA_A_2212112_F0002_OC.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/48ee/10208136/2f05b794e894/TSTA_A_2212112_F0003_OC.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/48ee/10208136/d93859bde753/TSTA_A_2212112_F0004_OC.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/48ee/10208136/a8c3d5e8b828/TSTA_A_2212112_F0005_OC.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/48ee/10208136/8b12004e8083/TSTA_A_2212112_F0006_OC.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/48ee/10208136/9d9857f2d1d8/TSTA_A_2212112_F0007_OC.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/48ee/10208136/08b3c03a44d8/TSTA_A_2212112_UF0001_OC.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/48ee/10208136/fd50d12f6b0d/TSTA_A_2212112_F0001_OC.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/48ee/10208136/67bd531da2c4/TSTA_A_2212112_F0002_OC.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/48ee/10208136/2f05b794e894/TSTA_A_2212112_F0003_OC.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/48ee/10208136/d93859bde753/TSTA_A_2212112_F0004_OC.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/48ee/10208136/a8c3d5e8b828/TSTA_A_2212112_F0005_OC.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/48ee/10208136/8b12004e8083/TSTA_A_2212112_F0006_OC.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/48ee/10208136/9d9857f2d1d8/TSTA_A_2212112_F0007_OC.jpg

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