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利用溅射玻璃碳层和转移蛾眼膜表征制造大规模蛾眼结构辊模

Large-Scale Moth-Eye-Structured Roll Mold Fabrication Using Sputtered Glassy Carbon Layer and Transferred Moth-Eye Film Characterization.

作者信息

Kato Kazuhiro, Sugawara Hiroyuki, Taniguchi Jun

机构信息

Geomatec Co., Ltd., Yokohama Landmark Tower, 9th Floor, 2-2-1 Minato Mirai, Nishi-ku, Yokohama 231-0022, Japan.

Department of Applied Electronics, Tokyo University of Science, 6-3-1 Niijyuku, Katsushika, Tokyo 162-8601, Japan.

出版信息

Nanomaterials (Basel). 2023 May 9;13(10):1591. doi: 10.3390/nano13101591.

Abstract

Currently, there is high demand for the development of a highly mass-producible technology for manufacturing moth-eye-structured films with an antireflection function. Conventional moth-eye-structured films have been produced by roll-to-roll (RTR) ultraviolet nanoimprint lithography (UV-NIL) using porous alumina, but the process of manufacturing the roll mold with aluminum is both complicated and time-consuming. To solve this problem, we proposed a sputtering process for forming a thin film of glassy carbon on a roll substrate and fabricated a moth-eye structure through the irradiation of oxygen plasma. A glassy carbon (GC) moth-eye-structure roll mold with a uniform reflectance of less than 0.1% over a length of 1560 mm was fabricated following this method. In addition, a superhydrophobic moth-eye-structured film was produced by RTR UV-NIL using the proposed roll mold, which exhibited a reflectance of 0.1%. In this study, a moth-eye-structure roll using porous alumina was compared with a film transferred from it. The GC moth-eye-structure roll mold was found to be superior in terms of antireflection, water repellency, and productivity. When the proposed large-area GC moth-eye-structured film was applied to window glass, significant anti-reflection and water-repellent functionalities were obtained.

摘要

目前,对于开发一种用于制造具有抗反射功能的蛾眼结构薄膜的高量产技术有很高的需求。传统的蛾眼结构薄膜是通过使用多孔氧化铝的卷对卷(RTR)紫外纳米压印光刻(UV-NIL)生产的,但用铝制造卷模的过程既复杂又耗时。为了解决这个问题,我们提出了一种在卷状基板上形成玻璃碳薄膜的溅射工艺,并通过氧等离子体辐照制造出蛾眼结构。按照这种方法制造出了一种玻璃碳(GC)蛾眼结构卷模,在1560毫米的长度上具有小于0.1%的均匀反射率。此外,使用所提出的卷模通过RTR UV-NIL生产出了一种超疏水蛾眼结构薄膜,其反射率为0.1%。在本研究中,将使用多孔氧化铝的蛾眼结构卷与从其转移的薄膜进行了比较。发现GC蛾眼结构卷模在抗反射、防水性和生产率方面更具优势。当将所提出的大面积GC蛾眼结构薄膜应用于窗户玻璃时,获得了显著的抗反射和防水功能。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/017b/10224109/78eb18f8704a/nanomaterials-13-01591-g001.jpg

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