Son Ji Young, Kim Su Han, Seo Ji Min, Lim Jongsun, Chung Taek-Mo, Park Bo Keun
Thin Film Materials Research Center, Korea Research Institute of Chemical Technology (KRICT), Daejeon 34114, Republic of Korea.
Department of Chemistry, Korea University, 145 Anam-ro, Seongbuk-gu, Seoul 02841, Republic of Korea.
ACS Omega. 2023 May 24;8(22):19816-19821. doi: 10.1021/acsomega.3c01706. eCollection 2023 Jun 6.
To substitute corrosive halogen ligands, we designed and synthesized novel tungsten complexes containing amido ligands, W(DMEDA) () and W(DEEDA) () (DMEDA = ,'-dimethylethylenediamido; DEEDA = ,'-diethylethylenediamido). Complexes and were characterized by H NMR, C NMR, FT-IR, and elemental analysis. The pseudo-octahedral molecular structure of was confirmed by single-crystal X-ray crystallography. The thermal properties of and were analyzed by thermogravimetric analysis (TGA), which confirmed that the precursors were volatile and exhibited adequate thermal stability. Additionally, the WS deposition test was performed using in thermal chemical vapor deposition (thermal CVD). Further analysis of the surface of the thin films was conducted using Raman spectroscopy, scanning electron microscopy (SEM), and X-ray photoelectron spectroscopy (XPS).
为了替代腐蚀性卤素配体，我们设计并合成了含酰胺配体的新型钨配合物W(DMEDA)()和W(DEEDA)()（DMEDA = ，'-二甲基乙二胺基；DEEDA = ，'-二乙基乙二胺基）。配合物 和 通过1H NMR、13C NMR、FT-IR和元素分析进行了表征。 通过单晶X射线晶体学确定了 的伪八面体分子结构。通过热重分析（TGA）分析了 和 的热性质，证实前体是挥发性的并且表现出足够的热稳定性。此外，在热化学气相沉积（热CVD）中使用 进行了WS沉积测试。使用拉曼光谱、扫描电子显微镜（SEM）和X射线光电子能谱（XPS）对薄膜表面进行了进一步分析。
