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使用射频磁控溅射法制备垂直排列碳纳米管的生长、表征及应用

Growth, Characterization, and Application of Vertically Aligned Carbon Nanotubes Using the RF-Magnetron Sputtering Method.

作者信息

Aleksanyan Mikayel, Sayunts Artak, Shahkhatuni Gevorg, Simonyan Zarine, Kasparyan Hayk, Kopecký Dušan

机构信息

Center of Semiconductor Devices and Nanotechnologies, Yerevan State University, 1 Alex Manoogian, 0025 Yerevan, Armenia.

Department of Mathematics, Informatics and Cybernetics, Faculty of Chemical Engineering, University of Chemistry and Technology Prague, Technická 5, Prague 6, 166 28 Prague, Czech Republic.

出版信息

ACS Omega. 2023 May 31;8(23):20949-20958. doi: 10.1021/acsomega.3c01705. eCollection 2023 Jun 13.

Abstract

The aim of this work is to synthesize and characterize a nanostructured material with improved parameters suitable as a chemiresistive gas sensor sensitive to propylene glycol vapor (PGV). Thus, we demonstrate a simple and cost-effective technology to grow vertically aligned carbon nanotubes (CNTs) and fabricate a PGV sensor based on FeO:ZnO/CNT material using the radio frequency magnetron sputtering method. The presence of vertically aligned carbon nanotubes on the Si(100) substrate was confirmed by scanning electron microscopy and Fourier transform infrared (FTIR), Raman, and energy-dispersive X-ray spectroscopies. The uniform distribution of elements in both CNTs and FeO:ZnO materials was revealed by e-mapped images. The hexagonal shape of the ZnO material in the FeO:ZnO structure and the interplanar spacing in the crystals were clearly visible by transmission electron microscopy images. The gas-sensing behavior of the FeO:ZnO/CNT sensor toward PGV was investigated in the temperature range of 25-300 °C with and without ultraviolet (UV) irradiation. The sensor showed clear and repeatable response/recovery characteristics in the PGV range of 1.5-140 ppm, sufficient linearity of response/concentration dependence, and high selectivity both at 200 and 250 °C without UV radiation. This is a basis for concluding that the synthesized FeO:ZnO/CNT structure is the best candidate for use in PGV sensors, which will allow its further successful application in real-life sensor systems.

摘要

这项工作的目的是合成并表征一种具有改进参数的纳米结构材料,该材料适合作为对丙二醇蒸汽(PGV)敏感的化学电阻式气体传感器。因此,我们展示了一种简单且经济高效的技术,用于生长垂直排列的碳纳米管(CNT),并使用射频磁控溅射法制造基于FeO:ZnO/CNT材料的PGV传感器。通过扫描电子显微镜以及傅里叶变换红外(FTIR)、拉曼和能量色散X射线光谱证实了Si(100)衬底上垂直排列的碳纳米管的存在。通过电子映射图像揭示了碳纳米管和FeO:ZnO材料中元素的均匀分布。通过透射电子显微镜图像可以清楚地看到FeO:ZnO结构中ZnO材料的六边形形状以及晶体中的晶面间距。在25 - 300°C的温度范围内,研究了FeO:ZnO/CNT传感器在有和没有紫外线(UV)照射的情况下对PGV的气敏行为。该传感器在1.5 - 140 ppm的PGV范围内表现出清晰且可重复的响应/恢复特性、响应/浓度依赖性的足够线性以及在200和250°C无紫外线辐射时的高选择性。由此可以得出结论,合成的FeO:ZnO/CNT结构是用于PGV传感器的最佳候选材料,这将使其能够在实际传感器系统中进一步成功应用。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/1c60/10268627/5d8d3edec57e/ao3c01705_0002.jpg

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