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用于扫描电子显微镜加速电压范围的Timepix探测器的特性描述。

Characterization of a Timepix detector for use in SEM acceleration voltage range.

作者信息

Denisov Nikita, Jannis Daen, Orekhov Andrey, Müller-Caspary Knut, Verbeeck Johan

机构信息

EMAT, University of Antwerp, Groenenborgerlaan 171, Antwerp, 2020, Belgium.

EMAT, University of Antwerp, Groenenborgerlaan 171, Antwerp, 2020, Belgium.

出版信息

Ultramicroscopy. 2023 Nov;253:113777. doi: 10.1016/j.ultramic.2023.113777. Epub 2023 Jun 8.

Abstract

Hybrid pixel direct electron detectors are gaining popularity in electron microscopy due to their excellent properties. Some commercial cameras based on this technology are relatively affordable which makes them attractive tools for experimentation especially in combination with an SEM setup. To support this, a detector characterization (Modulation Transfer Function, Detective Quantum Efficiency) of an Advacam Minipix and Advacam Advapix detector in the 15-30 keV range was made. In the current work we present images of Point Spread Function, plots of MTF/DQE curves and values of DQE(0) for these detectors. At low beam currents, the silicon detector layer behaviour should be dominant, which could make these findings transferable to any other available detector based on either Medipix2, Timepix or Timepix3 provided the same detector layer is used.

摘要

混合像素直接电子探测器因其卓越性能在电子显微镜领域越来越受欢迎。一些基于该技术的商业相机价格相对合理,这使其成为有吸引力的实验工具,特别是与扫描电子显微镜装置结合使用时。为了支持这一点,对Advacam Minipix和Advacam Advapix探测器在15 - 30 keV范围内进行了探测器特性(调制传递函数、探测量子效率)测定。在当前工作中,我们展示了这些探测器的点扩散函数图像、MTF/DQE曲线图表以及DQE(0)值。在低束流情况下,硅探测器层的行为应该起主导作用,这可能使这些发现能够应用于任何其他基于Medipix2、Timepix或Timepix3的可用探测器,前提是使用相同的探测器层。

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